Journal of Semiconductors, 2023, 44 (11): 114104, Published Online: Jan. 3, 2024  

Incomplete charge transfer in CMOS image sensor caused by Si/SiO2 interface states in the TG channel

Author Affiliations
1 School of Electronics and Information, Hangzhou Dianzi University, Hangzhou 310018, China
2 Tianjin Key Laboratory of Imaging and Sensing Microelectronic Technology, School of Microelectronics, Tianjin University, Tianjin 300072, China
3 Chongqing Optoelectronics Research Institute, Chongqing 400060, China
Abstract
CMOS image sensors produced by the existing CMOS manufacturing process usually have difficulty achieving complete charge transfer owing to the introduction of potential barriers or Si/SiO2 interface state traps in the charge transfer path, which reduces the charge transfer efficiency and image quality. Until now, scholars have only considered mechanisms that limit charge transfer from the perspectives of potential barriers and spill back effect under high illumination condition. However, the existing models have thus far ignored the charge transfer limitation due to Si/SiO2 interface state traps in the transfer gate channel, particularly under low illumination. Therefore, this paper proposes, for the first time, an analytical model for quantifying the incomplete charge transfer caused by Si/SiO2 interface state traps in the transfer gate channel under low illumination. This model can predict the variation rules of the number of untransferred charges and charge transfer efficiency when the trap energy level follows Gaussian distribution, exponential distribution and measured distribution. The model was verified with technology computer-aided design simulations, and the results showed that the simulation results exhibit the consistency with the proposed model.

Xi Lu, Changju Liu, Pinyuan Zhao, Yu Zhang, Bei Li, Zhenzhen Zhang, Jiangtao Xu. Incomplete charge transfer in CMOS image sensor caused by Si/SiO2 interface states in the TG channel[J]. Journal of Semiconductors, 2023, 44(11): 114104.

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