随着太赫兹探测技术的发展, 精确测量太赫兹探测器的光谱响应变得越来越重要。分析了太赫兹探测器相对光谱响应的测量原理, 搭建了一套太赫兹探测器相对光谱响应测量系统,对系统测量不确定度来源进行分析, 选用太赫兹探测器对测量系统不确定度进行验证。通过分析实验数据可知, 在 1~10 THz范围内, 系统的扩展不确定度为 9.2%, 可以满足目前太赫兹探测器相对光谱响应测量的需求。

With the development of terahertz detection technology, it becomes more and more important to accurately measure the relative spectral response of terahertz detector. The measuring principle of the relative spectral response of terahertz detector is analyzed, and a relative spectral response measurement system of terahertz detector is set up, the uncertainty of the measurement system is verified by using terahertz detector. According to the analysis of experimental data, the uncertainty of measurement is 9.2% in the range of 1 THz~10 THz, which can meet the requirements of relative spectral response measurement of terahertz detectors.