压电与声光, 2023, 45 (2): 165, 网络出版: 2023-11-29
基于有限元法和色散COM模型的声表面波滤波器联合仿真
Co-simulation of Surface Acoustic Wave Filter Based on Finite Element Method and Dispersive COM Model
声表面波(SAW)滤波器 全波仿真 分层级联 遗传算法 surface acoustic wave(SAW) filter full-wave simulation hierarchical cascade genetic algorithm
摘要
针对任意复杂膜系结构和电路拓扑结构的声表面波(SAW)滤波器的精确快速设计问题, 该文基于声/电/磁多物理场耦合全波仿真平台, 结合基因遗传优化算法和通用图形处理器(GPGPU)加速技术, 利用有限元分层级联精确模型(HCT)优化设计梯形谐振器, 色散COM模型优化设计纵向耦合谐振器, 实现了任意复杂膜系结构和电路拓扑结构的SAW滤波器的正向设计与优化。通过42° Y-XLiTaO3常规SAW滤波器的优化设计与研制, 设计优化结果与实验结果吻合较好, 验证了该方法的有效性和可行性。
Abstract
Aiming at the accurate and rapid design of surface acoustic wave (SAW) filter with any complex film structure and the circuit topology, the hierarchical cascade model(HCT) is used to optimize and design the trapezoidal resonator and the dispersive COM model is used to optimize and design the longitudinal coupling resonators, based on the full-wave simulation platform of acoustic/electrical/magnetic multi-physical field coupling, combined with the genetic optimization algorithm and general graphics processor(GPGPU) acceleration technology. The forward design and optimization of SAW filters with arbitrary complex film structure and circuit topology are realized. The optimization design and development of a 42° Y-X LiTaO3 conventional SAW filter were carried out, and the design optimization results were in good agreement with experimental results, verifying the effectiveness and feasibility of the proposed method.
郑泽渔, 杜雪松, 董加和, 陈正林, 马晋毅. 基于有限元法和色散COM模型的声表面波滤波器联合仿真[J]. 压电与声光, 2023, 45(2): 165. ZHENG Zeyu, DU Xuesong, DONG JiaHe, CHEN Zhenglin, MA Jinyi. Co-simulation of Surface Acoustic Wave Filter Based on Finite Element Method and Dispersive COM Model[J]. Piezoelectrics & Acoustooptics, 2023, 45(2): 165.
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