探究了在毛细管内充入气压比为8∶1的Ar-He混合气体条件下,初始气压对46.9 nm激光输出特性的影响。通过测量Ar-He混合气体产生46.9 nm激光的气压范围和每个气压下对应的激光强度与光斑形态信息,总结出激光输出特性与初始气压的关系。然后,从等离子体柱的角度分析了混合气体初始气压对激光光斑的影响,得到了混合气体初始气压导致46.9 nm激光输出特性发生变化的原因。以上对激光特性的研究对于提高激光幅值和改变光斑形状有益。

The effect of initial pressure on the output characteristics of the 46.9 nm laser is investigated when the Ar-He mixture with a pressure ratio of 8∶1 is filled into the capillary. By measuring the pressure range of 46.9 nm laser produced by Ar-He mixture, and the corresponding laser intensity and spot shape information at each pressure, the relationship between laser output characteristics and initial pressure of Ar-He mixture is summarized. Then, the influence of the initial pressure of Ar-He mixture on the laser spot is analyzed from the point of view of the plasma column, and the reason for the change of the output characteristics of 46.9 nm laser caused by the initial pressure of the Ar-He mixture is obtained. The above research on the laser characteristics is beneficial to improve the laser amplitude and change the shape of the laser spot.