激光与光电子学进展, 2023, 60 (21): 2112001, 网络出版: 2023-11-03  

一种重建深孔轴线的新型六探针测量系统

Novel Six-Probe Measurement System for Reconstructing Deep Hole Axes
作者单位
天津大学精密测试技术及仪器国家重点实验室,天津 300072
摘要
提出了一种用于深孔轴线重建的新型六探针测量系统。该系统基于三维两点法,探头在每次步进测量中可以获得被测横截面的圆心位置以及半径大小。该系统有以下优点:1)可以消除传感器运动装置的移动直线度误差对轴线测量与拟合结果造成的影响;2)有显著普遍性,调整位移传感器之间的相对位置可以测量不同的孔径;3)实现探头移动、数据获取的自动化,降低人工劳动量,提高测量效率;4)测量过程简单,只通过一次扫描测量就可拟合孔轴,并评估它的相关参数。通过理论推导和仿真证明了这些优点。实验结果表明,该方法具有高横向分辨率。
Abstract
A novel six-probe measurement system is proposed for reconstructing deep hole axes. This system is based on the two-point method in three dimensions. The probe can obtain the center position of the measured section and radius of the circle at each step. This novel approach has the following advantages. 1) The effects of the straightness error of the sensor motion device on the axis measurement and fitting results can be eliminated. 2) The approach has remarkable universality. The holes with different apertures can be measured by adjusting the relative position between displacement sensors. 3) Probe movement and data acquisition can be realized automatically which reduces the amount of labor and improves measurement efficiency. 4) The process of measurement is simple; the hole axis can be fitted using only a single scanning measurement, after which related parameters can be evaluated. These advantages were demonstrated by theoretical analyses and simulations. Further, experiments showed that this novel system can provide high lateral resolution.

刘常杰, 付开明, 郭漪涵. 一种重建深孔轴线的新型六探针测量系统[J]. 激光与光电子学进展, 2023, 60(21): 2112001. Changjie Liu, Kaiming Fu, Yihan Guo. Novel Six-Probe Measurement System for Reconstructing Deep Hole Axes[J]. Laser & Optoelectronics Progress, 2023, 60(21): 2112001.

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