MEMS微波功率传感器的悬臂梁弯曲模型研究
[1] NAKARMI B, CHEN H, WON Y H, et al. Microwave frequency generation, switching, and controlling using single-mode FP-LDs [J]. Journal of Lightwave Technology, 2018, 36(19): 4273-4281.
[2] DEHE A, FRICKE N K, KROZER V. Broadband thermoelectric microwave power sensors using GaAs foundry process [C]// 2002 IEEE MTT-S International Microwave Symposium. Seattle, WA, USA. 2002: 1829-1832.
[3] ELDERS J, SPIERING V, WALSH S. Microsystems technology (MST) and MEMS applications: an overview [J]. MRS Bulletin, 2001, 26(4): 312-315.
[4] 李德胜. MEMS技术及其应用 [M]. 哈尔滨: 哈尔滨工业大学出版社, 2002.
[5] 姜岩峰. 微电子机械系统 [J]. 电子工程师, 2006, 60(3): 59-59.
[6] MADNI A M, WAN L A. Microelectromechanical systems (MEMS): an overview of current state-of-the-art [C]// 1998 IEEE Aerospace Conference. New York, NY, USA. 1998: 421-427.
[7] FERNANDEZ L J, WIEGERINK R J, FLOKSTRA J, et al. A capacitive RF power sensor based on MEMS technology [J]. Journal of Micromechanics and Microengineering, 2006, 16(7): 1099.
[8] HAN L, HUANG Q A, LIAO X P. A microwave power sensor based on GaAs MMIC technology [J]. Journal of Micromechanics and Microengineering, 2007, 17(10): 2132.
[9] 蒋明霞, 杨刚, 周易, 等. 基于GaAs MMIC技术的残余应力测试结构的模拟与设计 [J]. 传感技术学报, 2012, 25(7): 897-901.
[10] 王德波, 白文娟, 郭艳艳, 等. 双通道MEMS微波功率传感器的悬臂梁设计 [J]. 微电子学, 2015, 45(3): 408-412.
[11] 谢嘉诚, 左文, 张聪淳, 等. MEMS悬臂梁的静态力学模型研究 [J]. 微电子学, 2020, 50(4): 543-547+554.
[12] REBEIZ G M. RF MEMS 理论·设计·技术 [M]. 黄庆安, 译. 南京: 东南大学出版社, 2005.
[13] LIU C. Foundations of MEMS [M]. Jersey City: Prentice Hall, 2011.
[14] 陈红霞, 刘文光, 方孟翔, 等. 压电悬臂梁振动模糊滑模控制 [J]. 压电与声光, 2022, 44(6): 965-971.
王德波, 孙浩宇. MEMS微波功率传感器的悬臂梁弯曲模型研究[J]. 微电子学, 2023, 53(5): 924. WANG Debo, SUN Haoyu. Research on Bending Model of Cantilever Beam for MEMS Microwave Power Sensors[J]. Microelectronics, 2023, 53(5): 924.