压电与声光, 2022, 44 (2): 180, 网络出版: 2022-06-14
低插损高频SAW滤波器的研究
Research on Low Insertion Loss and High Frequency SAW Filter
占空比 声表面波(SAW)滤波器 叉指换能器(IDT)型反射栅 电极厚度 “T+π”型拓扑结构 duty ratio surface acoustic wave(SAW) filter interdigital transducer(IDT) reflector grating electrode thickness “T+π” topology
摘要
采用单层膜、梯形结构基于128°YX-LiNbO3材料研究了Al电极厚度、叉指占空比、反射栅周期、拓扑结构对插损、带外抑制和矩形度的影响。为了降低带内波动和插入损耗,该文设计了一种叉指换能器(IDT)型反射栅结构,该结构对采取优化措施前后谐振器的带内最大尖峰损耗分别降低了8, 84%和0, 55%。最后采用此反射栅结构设计了一款低插损高频声表面波(SAW)滤波器,有限元仿真结果表明,该滤波器的中心频率为2, 520 5 GHz,插入损耗为-0, 502 12 dB,带外抑制大于30 dB,-3 dB损耗带宽大于98 MHz。
Abstract
In this paper, the effects of Al electrode thickness, interdigital duty ratio, reflector grating period and topology on insertion loss, out-of-band rejection and rectangle are investigated with a single layer and ladder structures based on 128 YX-LiNbO3 materials, In order to reduce the passband ripple and insertion loss, an interdigital transducer (IDT) reflector grating structure is designed, which can reduce the in-band peak loss of the resonator before and after optimization by 8, 84% and 0, 55%, respectively, Finally, a low interpolation loss high frequency surface acoustic wave (SAW) filter is designed based on this reflector grating structure, The results of the finite element simulation show that the center frequency of the filter is 2, 520 5 GHz, the insertion loss is -0, 502 12 dB, the out-of-band rejection is greater than 30 dB, and the -3 dB loss bandwidth is greater than 98 MHz,
王巍, 周杨春, 王方, 谭纪伟, 滕洪菠, 李俊峰. 低插损高频SAW滤波器的研究[J]. 压电与声光, 2022, 44(2): 180. WANG Wei, ZHOU Yangchun, WANG Fang, TAN Jiwei, TENG Hongbo, LI Junfeng. Research on Low Insertion Loss and High Frequency SAW Filter[J]. Piezoelectrics & Acoustooptics, 2022, 44(2): 180.