[1] BALYSHEVA O L, SAW filters for mobile communications:Achievements and prospects［C］//Petersburg: 2019 Wave Electronics and its Application in Information and Telecommunication Systems(WECONF),2019:1-4,

[2] LI Qi,FU Sulei,WANG Rong,et al, Enhanced power durability of surface acoustic wave filter with Al/Ti/Cu/Ti electrodes[J]. Journal of Alloys and Compounds,2018,740:222-228,

[3] HAGELAUER A,FATTINGER G,RUPPEL C,et al, Microwave acoustic wave devices:Recent advances on architectures,modeling,materials,and packaging[J]. IEEE Transactions on Microwave Theory and Techniques,2018,66(10):4548-4562,

[4] LIU Yuhao,LIU Jiansong,WANG Yiliu,et al, A novel structure to suppress transverse modes in radio frequency TC-SAW resonators and filters[J]. IEEE Microwave and Wireless Components Letters,2019,29(4):249-251,

[5] IWAMOTO H,TAKAI T,TAKAMINE Y,et al, Transverse modes in I H P SAW resonator and their suppression method［C］//Kobe:2018 IEEE International Ultrasonics Symposium (IUS),IEEE,2018:1-4,

[6] NAKAMURA H,GOTO K Y,HASHIMOTOET K Y,et al, Suppression of transverse-mode spurious responses for SAW resonators on SiO2/Al/LiNbO3 structure by selective removal of SiO2[J]. IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control,2011,58(10):2188-2193,

[7] ZOU Jie,LIU Jiansong,TANG Gongbin,et al, Transverse mode suppression in the AlN lamb wave resonators by “piston mode”［C］//Washington:2017 IEEE International Ultrasonics Symposium (IUS),2017:1-4,

[8] GOTO R,NAKAMURA H,HASHIMOTO K Y, Spurious free TC-SAW duplexer using the SiO2/LiNbO3 structure［C］// Glasgow:2019 IEEE International Ultrasonics Symposium (IUS)，2019:2075-2078,

[9] 黄歆,闫坤坤,黄玮,等, 超宽带低损耗SAW滤波器的优化设计[J]. 压电与声光,2020,42(2):155-158,

[10] TAKAI T,IWAMOTO H,TAKAMINE Y,et al, High performance SAW resonator on new multi-layered substrate using LiTaO3 crystal[J]. IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control,2017,64(9):1382-1389,

[11] NOVGORODOV V,FREISLEBEN S,HEIDE P,et al, Modified ladder-type 2, 4 GHz SAW filter with transmission zero［C］//San Diego:2010 IEEE International Ultrasonics Symposium,2010:2083-2086,

[12] XIE Bowei,DING Fazhu,DONG Zebin,et al, FEM analysis of piezoelectric film as IDT on the diamond substrate to enhance the quality factor of SAW devices[J]. Diamond and Related Materials,2020,102(C):107659-107667,

[13] JIN Jianming, Theory and computation of electromagnetic fields[M]. Hoboken,NJ,USA:John Wiley & Sons,Inc,2010,

[14] ZHANG Yangming,JIN Jun,LI Honglang,et al, A novel method to extract COM parameters for SAW based on FEM［C］//Harbin:2019 Symposium on Piezoelectrcity,Acoustic Waves and Device Applications(SPAWDA),IEEE,2019:1-5,

[15] 王巍,周杨春,王方,等, 基于COMSOL的声表面波器件二维等效模型设计[J]. 压电与声光,2021,43(5):605-608,

[16] TAKAMINE Y,TAKAI T,IWAMOTO H,et al, A novel 3, 5 GHz low-loss bandpass filter using I H P SAW Resonators［C］//Kyoto:2018 Asia-Pacific Microwave Conference(APMC),IEEE,2018:1342-1344,

[17] HASHIMOTO K Y,ASANO H,MATSUDA K,et al, Wideband Love wave filters operating in GHz range on Cu-grating/rotated-YX-LiNbO3-substrate structure［C］// Montreal:Ultrasonics Symposium,IEEE,2004:1330-1334,

[18] LUEG P, Process of silencing sound oscillations:US 2043416［P］, 1936-01-15,