激光作用锡靶等离子体极紫外光转换效率与等离子体特性密切相关。为了对等离子体特性进行诊断, 设计了一种用于激光等离子体诊断的朗缪尔探针, 取得了不同激光能量下产生的锡等离子体电子温度与电子密度的时间演化。结果表明, 能量为58.1mJ的激光产生的等离子体峰值电子密度约为4.5×1011cm-3, 最大电子温度为16.5eV, 均随激光能量减少而降低, 与发射光谱法所测的电子温度演化趋势一致。该研究为激光等离子体极紫外光源提供了一种新的简单快速诊断方法, 有利于对激光等离子体的极紫外光源的参量进行优化。

The extreme ultraviolet (EUV) light conversion efficiency of the laser-produced tin plasma is closely related to the plasma characteristics. To diagnose the parameters of tin plasma, a Langmuir probe for laser-produced plasma diagnosis was designed. And the time evolution of electron temperature and electron density of tin plasma produced by different laser energies were studied. The results show that the peak electron density of the plasma is about 4.5×1011cm-3 with laser energy of 58.1mJ, and the maximum electron temperature is 16.5eV, which decreased with the reduction of laser energy. Moreover, the evolution trends of electron temperature measured by Langmuir probe and emission spectrometry are consistent. This study provides a new simple and rapid diagnostic method for laser-produced plasma EUV light source, which is beneficial to optimize the parameters of EUV light.