一种高灵敏度在线式MEMS微波功率传感器

金叶; 王德波

doi:doi:10.13911/j.cnki.1004-3365.220320

微电子学, 2023, 53 (2): 304, 网络出版: 2023-12-15

一种高灵敏度在线式MEMS微波功率传感器

A High Sensitivity On-Line MEMS Microwave Power Sensor

论文大纲

金叶王德波

作者单位

南京邮电大学电子与光学工程学院、柔性电子(未来技术)学院，南京 210023

微波功率传感器电容式双悬臂梁结构灵敏度 microwave power sensor capacitive double cantilever beam structure sensitivity MEMS MEMS

摘要

为了改善在线式MEMS微波功率传感器的灵敏度特性，设计了一种新型双悬臂梁结构的MEMS微波功率传感器。该结构将测试电极和锚区设计在中心信号线的两侧。建立了双悬臂梁集总电路等效模型，研究了双悬臂梁结构的微波功率传感器的微波特性。构建了枢纽式双悬臂梁静力学模型，研究并分析了新型悬臂梁结构的过载功率与灵敏度。结果表明，相比于测试电极和锚区位于信号线同侧的传统单悬臂梁结构，新型双悬臂梁结构的灵敏度提升了6~8倍。这在一定程度上解决了电容式微波功率传感器检测灵敏度较低的问题。

Abstract

In order to improve the sensitivity characteristics of the on-line MEMS microwave power sensors, a novel type of MEMS microwave power sensor with double cantilever beams was designed. The measured electrodes and the anchors were located on opposite sides of the central signal line in this structure. A lumped equivalent model of double cantilever beam circuit was established, and the microwave characteristics of the double cantilever beam were studied. A pivot-type static model of double cantilever beam was established. The overload power and the sensitivity of this novel cantilever beam structure were theoretically analyzed. The results show that the sensitivity of the novel double cantilever beam structure is 6-8 times higher than that of the traditional single cantilever structure in which the measured electrode and the anchor are located on the same side of the signal line. It solves the disadvantage of the low sensitivity of the capacitive microwave power sensor to a certain extent.

参考文献

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金叶, 王德波. 一种高灵敏度在线式MEMS微波功率传感器[J]. 微电子学, 2023, 53(2): 304. JIN Ye, WANG Debo. A High Sensitivity On-Line MEMS Microwave Power Sensor[J]. Microelectronics, 2023, 53(2): 304.

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