压电与声光, 2023, 45 (5): 674, 网络出版: 2024-01-06
基于36°Y-X钽酸锂的扇形声表滤波器设计与研究
Design and Study on Fan-Shaped SAW Filter Based on 36°Y-X LiTaO3 Substrates
扇形声表滤波器 漏波材料 36°Y-X钽酸锂 插入损耗 温度稳定性 fan-shaped SAW filter leaky wave material 36°Y-X LiTaO3 insertion loss temperature stability
摘要
该文提出了基于钽酸锂漏波材料设计的扇形声表滤波器。钽酸锂在36°Y-X切向时，其机电耦合系数(ΔV/V)为2.4%、频率温度系数(TCF)为-32×10-6/℃。36°Y-X钽酸锂具有较强的压电耦合性和适中的温度稳定性，用它设计相对带宽5%~10%的滤波器可以实现较小的插入损耗和适中的温度稳定性，器件实测结果与仿真相符。
Abstract
The design method of fan-shaped SAW filter using leaky wave propagating on LiTaO3 substrates is proposed in this paper. The electromechanical coupling coefficient (ΔV/V) of 36°Y-X LiTaO3 substrates is 2.4%, and the temperature coefficient of frequency (TCF) is -32×10-6/℃. The 36°Y-X LiTaO3 has strong piezoelectric coupling characteristic and moderate temperature stability, based on it, the designed SAW filter with 5%~10% fractional bandwidth can achieve less insertion loss and moderate temperature stability. The measured results of fabricated device are consistent with the simulated ones.
参考文献
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蒋道军, 吴燕, 张显洪, 肖强, 董加和, 蒋国宇. 基于36°Y-X钽酸锂的扇形声表滤波器设计与研究[J]. 压电与声光, 2023, 45(5): 674. JIANG Daojun, WU Yan, ZHANG Xianhong, XIAO Qiang, DONG Jiahe, JIANG Guoyu. Design and Study on Fan-Shaped SAW Filter Based on 36°Y-X LiTaO3 Substrates[J]. Piezoelectrics & Acoustooptics, 2023, 45(5): 674.
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