多波长广角f-theta透镜光学设计

周燕; 沈涛

doi:doi:10.5768/jao201738.0401003

应用光学, 2017, 38 (4): 533, 网络出版: 2017-10-12

多波长广角f-theta透镜光学设计

Optical design of wide-angle multi-wavelength f-theta lens

论文大纲

周燕沈涛

作者单位

哈尔滨理工大学, 黑龙江哈尔滨 150080

光学设计广角f-theta透镜光焦度分配激光打标 optical design wide angle f-theta lens optical power distribution laser marking

摘要

f-theta透镜作为激光扫描系统中必不可少的部件, 对系统工作面尺寸、测量速度、测量精度等起着决定性的作用。为改变以往f-theta透镜扫描范围小、工作波长单一等不足, 设计出了一种工作于486 nm~656 nm波段的广角f-theta透镜。通过初级像差分析, 确定系统的初级结构参数, 利用光学材料的不同色散性能分配合理的光焦度来进行色差校正。设计结果表明: f-theta镜头像散值在像差容限范围内满足平像场要求, f-theta镜头系统最大色差为3 μm, 线性畸变误差值不超过0.015%, 光能利用率接近90%, 聚焦性能接近衍射极限, 满足多工作波长、高精度激光打标机的实际需求。

Abstract

The f-theta lens is an important essential component in laser scanning systems that plays a decisive role in working surface, measuring speed and measurement accuracy,etc. A wide-angle f-theta lens operating at 486 nm ~ 656 nm is designed to change the range of small f-theta lens scanning range and single operating wavelength.Through the primary aberration analysis, the primary structure parameters of the system are determined, and the chromatic aberration correction is carried out by using the optical power distribution with different dispersion properties. The final design result shows that the lateral color is less than 3 μm, the calibrated f-Theta distortions are all less than 0.015% and the energy utilization rate is nearly 90%,which means that the focusing performances are close to the diffraction-limited. The system meets the requirements of high-precision laser marking systems with different waves.

参考文献

[1] Achtner B. Characterization of the image quality of a wide angle MWIR f-theta objective lens by means of pixel contrast［J］.SPIE, 2016, 9822: 1-7.

[2] Astarita A, Genna S, Leone C, et al. Study of the laser marking process of cold sprayed titanium coatings on aluminium substrates［J］. Optics & Laser Technology, 2016, 83: 168-176.

[3] Yurevich V I, Grimm V A, Afonyushkin A A, et al. Optical design and performance of f-theta lenses for high-power and high-precision applications［J］.SPIE, 2015, 9626: 1-16.

[4] 谢晋, 孙晋祥, 黎宇弘, 等. F-Theta自由曲面透镜的精密与镜面磨削［J］. 机械工程学报, 2016, 52(17): 72-77.

Xie Jin, Sun Jinxiang, Li Yuhong, et al. Precision and mirror grinding of f-theta freeform surface lens［J］.Journal of Mechanical Engineering, 2016, 52(17): 72-77.

[5] Wylie P G, Onley D J, Hanmmerstein A F. Advances in laser scanning imaging cytometry for high-content screening［J］. Assay & Drug Development Technologies, 2015, 13(2): 66-78.

[6] 苏阳, 安志勇, 李琦, 等. 广角大相对孔径f-θ透镜光学设计［J］. 应用光学, 2015, 36(3): 376-380.

Su Yang, An Zhiyong, Li Qi, et al. Optical design of wide-angle large-relative-aperture f-θ lens［J］. Journal of Applied Optics, 2015, 36(3): 376-380.

[7] Sun W S, Tien C L ,Chen Y H, et al. Ultra-wide angle lens design with relative illumination analysis［J］. Journal of the European Optical Society Rapid Publications, 2016, 11: 16001-1-5.

[8] Fuse K, Okaida T, Ebata K. Diffractivc refractive hybrid f-theta lens for laser drilling of multilayer printed circuit boards［J］. SPIE, 2003, 4830: 95-100.

[9] Jin K H,Yahang J S, Park C S, et al. Telecentric f-theta lens for high-speed terahertz reflection three-dimensional imaging［C］. New York: IEEE, 2014: 1-2.

[10] 付敏敏, 陈培锋, 王英, 等. 超广角大工作面f-theta镜头的光学设计［J］. 应用光学, 2011, 32(6): 1083-1087.

Fu Minmin, Chen Peifeng, Wang Ying, et al. Optical design of super wide angle f-theta lens with large operation area［J］. Journal of Applied Optics, 2011, 32(6): 1083-1087.

[11] 季轶群, 刘红军, 沈为民. f-θ透镜的光学设计［J］.光子学报, 2007, 36(1): 73-75.

Ji Yiqun, Liu Hongjun, Shen Weimin. Optical design of f-θ lens［J］. Acta Photonica Sinica, 2007, 36(1): 73-75.

[12] 张以漠. 应用光学［M］. 天津: 机械工业出版社, 1982: 120-295.

Zhang Yimo. Applied optics［M］. Tianjin: China Machine Press, 1982: 120-295.

周燕, 沈涛. 多波长广角f-theta透镜光学设计[J]. 应用光学, 2017, 38(4): 533. Zhou Yan, Shen Tao. Optical design of wide-angle multi-wavelength f-theta lens[J]. Journal of Applied Optics, 2017, 38(4): 533.

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