基于薄板理论的密排结构CMUT发射声场研究
[1] OLCUM S,YALCIN-YAMANER F,BOZKURT A,et al.Deep-collapse operation of capacitive micromachined ultrasonic transducers[J].IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control,2011,58(11):2475-2483.
[2] CARONTI A,CALIANO G,CAROTENUTO R,et al.Capacitive micromachined ultrasonic transducer (CMUT) arrays for medical imaging[J].Microelectronics Journal,2006,37(8):770-777.
[3] CHEN Jingkuang,WANG Mengli,CHENG J C,et al.A photoacoustic imager with light illumination through an infrared-transparent silicon CMUT array[J].IEEE Transactions on Ultrasonics Ferroelectrics & Frequency Control,2012,59(4):766-775.
[4] WYGANT I O,ZHUANG Xuefeng,YEH D T,et al.Integration of 2D CMUT arrays with front-end electronics for volumetric ultrasound imaging[J].IEEE Trans Ultrason Ferroelectr Freq Control,2008,55(2):327-342.
[5] YEH D T,ORALKAN O,WYGANT I O,et al.High-resolution imaging with high-frequency 1-D linear CMUT arrays[C]//Rotterdam,Netherlands:IEEE Ultrasonics Symposium,2005 IEEE,2005,1:665-668.
[6] PARK K K,LEE H J,YARALIOGLU G G,et al.Capacitive micromachined ultrasonic transducers for chemical detection in nitrogen[J].Applied Physics Letters,2007,91(9):094102.1-094102.3.
[7] NAZEMI H,EMADI A.A new advanced analytical model for Bi-layer circular CMUT-based gas sensors[C]//Montreal,QC,Canada:2019 IEEE Sensors,IEEE,2019:1-4.
[8] CRISTMAN P,ORALKAN O,ZHUANG Xuefeng,et al.A 2D CMUT hydrophone array:Characterization results[C]//Rome,Italy:2009 IEEE International Ultrasonics Symposium,IEEE,2009:992-995.
[9] SHAHIRI-TABARESTANI M,GANJI B A,SABBAGHI-NADOOSHAN R.Design and simulation of high sensitive capacitive pressure sensor with slotted diaphragm[C]//Penang,Malaysia:2012 International Conference on Biomedical Engineering (ICoBE),IEEE,2012:484-489.
[10] SHIN K S,JANG C I,KIM M J,et al.Development of novel implantable intraocular pressure sensors to enhance the performance in in vivo tests[J].Journal of Microelectromechanical Systems,2015,24(6):1896-1905.
[11] SHIN M,KRAUSE J S,DEBITETTO P A,et al.Acoustic Doppler velocity measurement system using capacitive micromachined ultrasound transducer array technology[J].Journal of the Acoustical Society of America,2013,134(2):1011-1020.
[12] SAVOIA A,CALIANO G,IULAT A,et al.Design and fabrication of a cMUT probe for ultrasound imaging of fingerprints[C]//San Diego,CA,USA:2010 IEEE International Ultrasonics Symposium,IEEE,2010:1877-1880.
[13] KWAK Y S,CHOI W Y,PARK K K.Fingerprint imaging using CMUT impediography with glass waveguide[C]//Washington,DC,USA:2017 IEEE International Ultrasonics Symposium (IUS),IEEE,2017:1-4.
[14] YOU W,CRETU E,ROHLING R.Analytical modeling of CMUTs in coupled electro-mechano-acoustic domains using plate vibration theory[J].IEEE Sensors Journal,2011,11(9):2159-2168.
[15] WANG Jiujiang,XIN Liu,YU Yuanyu,et al.A review on analytical modeling for collapse mode capacitive micromachined ultrasonic transducer of the collapse voltage and the static membrane deflections[J].Micromachines,2021,12(6):714-727.
[16] YAAR A R,YLDZ F,EROUL O.Capacitive micromachined ultrasonic transducer:transmission performance evaluation under different driving parameters and membrane stress for underwater imaging applications[J].Microsystem Technologies,2020,26(12):3601-3611.
[17] WANG Jiujiang,YU Yuanyu,PUN S H,et al.An accurate design to calculate and measure the capacitance of CMUT for pressure sensors[C]//Guangzhou,China:2016 IEEE International Conference on Consumer Electronics-China (ICCE-China),IEEE,2016:1-4.
[18] 张雯.多振膜结构电容式微超声传感器关键技术研究[D].天津:天津大学,2016:58-60.
[19] 何常德,张国军,王红亮,等.电容式微机械超声换能器技术概述[J].中国医学物理学杂志,2016,33(12):1249-1252.
[20] 曹志远.板壳振动理论[M].北京:中国铁道出版社,1989.
[21] 高鹏飞,何常德,张彦军,等.电容式微机械超声换能器振膜设计与声学辐射研究[J].传感器与微系统,2022,41(4):10-13.
[22] 高鹏飞,何常德,张彦军,等.CMUT阵元的声学分析与环形扫描成像[J].应用声学,2022,41(2):293-300.
[23] 李一凡,张赛,何常德,等.面向CMUT阵元的阻抗匹配设计与声场特性测试[J].传感器与微系统,2022,41(4):89-92.
沈姝君, 何常德, 张彦军, 高鹏飞, 张国军, 杨玉华, 王任鑫, 张文栋. 基于薄板理论的密排结构CMUT发射声场研究[J]. 压电与声光, 2023, 45(1): 98. SHEN Shujun, HE Changde, ZHANG Yanjun, GAO Pengfei, ZHANG Guojun, YANG Yuhua, WANG Renxin, ZHANG Wendong. Study on Sound Field Emitted by Close-Packed CMUT Element Based on Thin Plate Vibration Theory[J]. Piezoelectrics & Acoustooptics, 2023, 45(1): 98.