为了实现平行度误差的精确测量, 提出了基于位置敏感探测器(PSD)激光准直法的平行度误差测量方法, 并设计了实验测量系统。该系统利用倒置望远镜结构二次透镜变换的方法, 对准直激光束的发散角和光斑大小进行平衡, 通过光学五棱镜转折光路, 由PSD将测量位移经信号调理电路和数据采集及处理系统, 实时得到测点相对于基准的位置, 再以最小包容区域法快速评定出被测要素和基准要素两者之间的平行度误差。结果表明, 系统相对不确定度为0.077%, 具有较高的测量精度。该研究为平行度误差的精密测量技术提供了有效测量方法, 具有一定的现实指导意义。

In order to realize the precise measurement of the parallelism error, the laser collimating method of parallelism error measuring method based on position sensitive device (PSD) was proposed, and the experimental measurement system was designed. The divergence angle and spot size of the alignment laser beam were balanced by using the method of the second lens transformation of the inverted telescope structure. The optical path was turned by using an optical pentaprism, and then the position of a point relative to the measurement reference can be obtained in real time by PSD signal conditioning circuit as well as data acquisition and processing system. Then, the parallelism error between the toleranced feature and the datum feature can be quickly evaluated by using the minimum zone method, and the theoretical analysis and experimental verification were carried out. The experimental results show that the relative uncertainty of the measuring system is 0.077%, which has high measurement accuracy. It provides an effective measurement method for the precision measurement technology of parallelism error and has certain practical guiding significance.