为了研究飞秒激光对光电探测器光学性能的影响，本文对飞秒脉冲激光辐照CsPbBr₃背靠背肖特基光电探测器的损伤特性，以及不同激光功率密度下的光电性能进行了研究。利用化学气相沉积法在ITO叉指电极上沉积CsPbBr₃微米晶薄膜，制备了背靠背肖特基型全无机钙钛矿光电探测器。利用脉冲宽度为35 fs的钛宝石飞秒激光器辐照CsPbBr₃光电探测器，通过显微镜观察不同激光功率密度下CsPbBr₃多晶薄膜的损伤形貌，并研究了不同功率密度损伤下肖特基结构的钙钛矿光电探测器的光电性能变化。结果表明：自制的全无机金属卤化物肖特基光电探测器具有较高的损伤阈值，达到了2.1 W/cm²，并且在样品轻度损伤的情况下，样品的光电特性出现了一定程度的提升，光谱响应度出现了50 nm的展宽，并且在部分薄膜受热脱落后，器件仍然保持一定的光电探测性能。

To understand the effects of femtosecond lasers on the optical performance of the photodetectors, the damage characteristics of a CsPbBr₃ back-to-back Schottky photodetector irradiated by femtosecond pulses and its photoelectric performance under various laser energy densities were evaluated. A CsPbBr₃ microcrystal film on the ITO interdigital electrode was deposited by chemical vapor deposition and a back-to-back Schottky type all-inorganic perovskite photodetector was prepared. The CsPbBr₃ photodetector was irradiated by a Ti:Sapphire femtosecond laser with a pulse width of 35 fs. The damage morphology of the CsPbBr₃ polycrystalline film under different laser energy densities was observed using a microscope, and the photoelectric performance of the Schottky-structure perovskite photodetector damaged under different energy densities was evaluated. Results suggest that the damage threshold of the self-made all-inorganic metal halide Schottky photodectector is as high as 2.1 W/cm², and when the sample is slightly damaged, the photoelectric characteristics of the sample are improved to a certain extent and the spectral responsivity is broadened by 50 nm. As part of the film is heated off, the sample still maintains a certain level of detection performance.