该文研制了一种高性能温补型薄膜体声波谐振(TC-FBAR)滤波器。采用COMSOL软件对高性能温补型结构的谐振器进行建模和仿真，在常规一维Mason等效电路模型的基础上进行修正，再在ADS中对滤波器进行仿真优化设计，得到阶梯型结构的TC-FBAR滤波器。采用空腔型结构并制备出温补型FBAR滤波器芯片，同时在常规TC-FBAR基础上制备空气桥和凸起层结构，得到双空气桥结构的高性能TC-FBAR滤波器。测试结果表明，滤波器的中心频率为2.43 GHz，最小插损为1.02 dB，1 dB带宽为70.5 MHz，频率温度系数为1.82×10-6/℃。

In this paper, a high performance temperature compensation thin film bulk acoustic resonator (TC-FBAR) filter is developed. The COMSOL software is used to model and simulate the resonator with high performance thermal compensation structure, and the model is modified on the basis of the conventional one-dimensional Mason equivalent circuit model, and then the filter is simulated and optimized in ADS, finally, the TC-FBAR filter with stepped structure is realized. The temperature compensation FBAR filter chip is fabricated by using the cavity structure. On the basis of the conventional TC-FBAR, the air bridge and convex structure are prepared, thus the high performance TC-FBAR filter with dual air bridge structure is obtained. The test results show that the center frequency of the filter is 2.43 GHz, the minimum insertion loss is 1.02 dB, 1 dB bandwidth is 70.5 MHz, and frequency temperature coefficient is 1.82×10-6/℃.