提出了一套应用于准分子激光微加工同轴观测的自动跟踪系统。该系统具有一定的抗抖动能力。首先介绍了该系统的硬件组成部分: (1)显微镜的镜片改造。(2)机械控制平台的搭建, 该部分内容介绍了各个硬件的功能以及它们之间的相互关系。然后简单介绍了该系统的跟踪原理, 主要包括部分重点算法的介绍以及控制软件判断流程图。分析了在打开/关闭跟踪功能后, 通道的加工质量差别。分析了打开/关闭跟踪功能后中心位移的偏移量差别, 验证了自动跟踪的抗振动功能。最后, 针对该系统功能进行了实验, 成功实现了对预设曲线(对应于微通道的轨迹曲线)进行刻蚀加工的跟踪功能。

In this paper, We propose an automatic tracking system applied in excimer laser coaxial observation micro processing system. The system has a vibration resistance function. In this paper, I first introduced the hardware of the system: (1) Microscope optical system’s transformation. (2) Mechanical control platform structures, this part describes the function of each hardware. Second, I briefly introduced the system's tracking principle, mainly including the introduction of some key algorithms and programme of the flow chart. Third, through turning on / off the tracking function, I researched the difference of channel processing quality. I analysed the difference of open/close tracking function center displacement, to verify the automatic tracking’s function of resistance to vibrating. Finally, the system has successfully achieved the tracking function of the etching processing of the preset curves (corresponding to the trajectory of the micro-channel curve).