热振子式双轴MEMS角速度陀螺敏感机理的研究
[1] 李晓阳,王伟魁,汪守利,等.MEMS惯性传感器研究现状与发展趋势[J].遥测遥控,2019,40(6):1-13.
[2] 江文清,夏志平.微机械陀螺仪的新进展及发展趋势[J].科技视界,2017(28):87-90.
[3] 翟羽婧,杨开勇,潘瑶,等.陀螺仪的历史、现状与展望[J].飞航导弹,2018(12):84-88.
[4] 赵砚驰,程建华,赵琳.惯性导航系统陀螺仪的发展现状与未来展望[J].导航与控制,2020,19(Z1):189-196.
[5] 史文策,许江宁,林恩凡.陀螺仪的发展与展望[J].导航定位学报,2021,9(3):8-12.
[6] 李永,赵正平.MEMS陀螺仪的研究现状与进展[J].微纳电子技术,2021,58(9):757-768.
[7] ZAREI N,LEUNG A M,JONES J D.Design principles of the thermal MEMS gyroscope[C]//Houston,Texas,USA:ASME International Mechanical Engineering Congress and Exposition.American Society of Mechanical Engineers,ASME,2012,45257:357-361.
[8] NIE B,WANG W,YE F,et al.A micromachined three-axis gas inertial sensor based on bidirectional thermal expansion flow[C]//Las Vegas,NV,USA:2017 IEEE 30th International Conference on Micro Electro Mechanical Systems,IEEE,2017:1091-1094.
[9] KOCK G,COMBETTE P,TEDJINI M,et al.Experimental and numerical study of a thermal expansion gyroscope for different gases[J].Sensors,2019,19(2):360.
[10] KOCK G,COMBETTE P,CHARLOT B,et al.Ree alization and study of a thermal gyroscope based on thermal expansion[C]//Rome,Italy:2018 Symposium on Design,Test,Integration & Packaging of MEMS and MOEMS (DTIP),IEEE,2018:1-6.
[11] KOCK G,COMBETTE P,CHARLOT B,et al.Shock behaviour of gyroscope based on gas thermal expansion[C]//Lake Como,Italy:2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL),IEEE,2018:1-2.
[12] BAHARI J,MENON C.Exclusion of linear acceleration signal in the MEMSthermal gyroscope[J].Journal of Microelectromechanical Systems,2018,27(1):19-21.
[13] LUO H,WANG X,ZHAO C,et al.A novel two-dimensional model for micro thermal expansion-based gyroscopes towards parametric analysis and efficient optimization[C]//Montreal,QC,Canada:2019 IEEE SENSORS,IEEE,2019:1-4.
朴林华, 张严, 佟嘉程, 李备. 热振子式双轴MEMS角速度陀螺敏感机理的研究[J]. 压电与声光, 2023, 45(3): 477. PIAO Linhua, ZHANG Yan, TONG Jiacheng, LI Bei. Study on the Sensitivity Mechanism of Thermal Oscillator Type Biaxial MEMS Angular Velocity Gyro[J]. Piezoelectrics & Acoustooptics, 2023, 45(3): 477.