扫描白光干涉术是目前最精确的表面形貌测量技术之一，被广泛应用于工业与科研领域。从发明至今的三十余年间，在精密光学、半导体、汽车及航天等先进制造领域的需求牵引下，该技术不断取得新的进展与突破。本文从技术应用、方法和算法创新、系统设计、理论模型、校准与误差补偿等方面，总结了过去二十年扫描白光干涉技术的重要进展，对该领域进一步发展提出了展望。

Scanning white light interferometry is one of the most accurate surface topography measurement techniques. It is widely used in various industrial and scientific research fields. Since its invention more than thirty years ago, the progress and breakthroughs of this technique have been continuously made, driven by the demands of advanced manufacturing sectors such as precision optics, semiconductors, automotive and aerospace. This paper summarizes the important progress of scanning white light interferometry in the past two decades from the aspects of its applications, new measurement methods and algorithms, system designs, theoretical modeling, calibration and error compensation, and puts forward the prospect of further development in this field.