二氧化碳对同质外延生长单晶金刚石内应力的影响
[1] CHEN Y C, TZENG Y, CHENG A J, et al. Inkjet printing of nanodiamond suspensions in ethylene glycol for CVD growth of patterned diamond structures and practical applications[J]. Diamond and Related Materials, 2009, 18(2/3): 146-150.
[2] DE SIO A, DI FRAIA M, ANTONELLI M, et al. X-ray micro beam analysis of the photoresponse of an enlarged CVD diamond single crystal[J]. Diamond and Related Materials, 2013, 34: 36-40.
[3] MAMEDOV T N, BATURIN A S, BLANK V D, et al. Muonium in synthetic diamond[J]. Diamond and Related Materials, 2013, 31: 38-41.
[4] 王伟华,代 兵,王 杨,等.异质外延单晶金刚石的研究进展[J].中国科学:技术科学,2020,50(7):831-848.
[5] HARRIS D C. Properties of diamond for window and dome applications[C]//San Diego, CA, USA: SPIE′s 1994 International Symposium on Optics, Imaging, and Instrumentation. Proc SPIE 2286, Window and Dome Technologies and Materials IV, 1994, 2286: 218-228.
[6] 阳 硕,满卫东,赵彦君,等.MPCVD法合成单晶金刚石的研究及应用进展[J].真空与低温,2015,21(3):131-138.
[7] 宋修曦,马志斌,耿传文,等.不同温度下同质外延生长单晶金刚石的应力分析[J].人工晶体学报,2018,47(5):942-947.
[8] FENG Z B, CHAYAHARA A, YAMADA H, et al. Surface stress measurement with interference microscopy of thick homoepitaxial single-crystal diamond layers[J]. Diamond and Related Materials, 2010, 19(12): 1453-1456.
[9] 李一村,舒国阳,刘 刚,等.MPCVD单晶金刚石初始及断续生长界面的表征与分析[J].人工晶体学报,2020,49(10):1765-1769.
[10] 熊 刚,汪建华,翁 俊,等.氢氧等离子体预处理对单晶金刚石刻蚀坑的研究[J].真空科学与技术学报,2017,37(9):909-915.
[11] 夏禹豪.氮元素对单晶金刚石生长的影响[D].武汉:武汉工程大学,2019.
[12] ROBINS L H, FARABAUGH E N, FELDMAN A. Line shape analysis of the Raman spectrum of diamond films grown by hot-filament and microwave-plasma chemical vapor deposition[J]. Journal of Materials Research, 1990, 5(11): 2456-2468.
[13] YAN C S, VOHRA Y K, MAO H K, et al. Very high growth rate chemical vapor deposition of single-crystal diamond[J]. Proceedings of the National Academy of Sciences of the United States of America, 2002, 99(20): 12523-12525.
[14] LIANG Q, YAN C S, MENG Y F, et al. Recent advances in high-growth rate single-crystal CVD diamond[J]. Diamond and Related Materials, 2009, 18(5/6/7/8): 698-703.
[15] DAS D, SINGH R N, BARNEY I T, et al. Effect of oxygen on growth and properties of diamond thin film deposited at low surface temperature[J]. Journal of Vacuum Science & Technology, A Vacuum, Surfaces, and Films, 2008, 26(6): 1487-1496.
[16] HARRIS S J, WEINER A M. Methyl radical and H-atom concentrations during diamond growth[J]. Journal of Applied Physics, 1990, 67(10): 6520-6526.
[17] TALLAIRE A, ACHARD J, SILVA F, et al. Oxygen plasma pre-treatments for high quality homoepitaxial CVD diamond deposition[J]. Physica Status Solidi (a), 2004, 201: 2419-2424.
[18] HEMLEY R J, MAO H K, YAN C S. Colorless single-crystal CVD diamond at rapid growth rate: US20070196263[P]. 2007-08-23.
[19] MOLLART T P, LEWIS K L. Optical-quality diamond growth from CO2-containing gas chemistries[J]. Diamond and Related Materials, 1999, 8(2/3/4/5): 236-241.
[20] ZHANG Q, LI H, CHENG S, et al. The effect of CO2 on the high-rate homoepitaxial growth of CVD single crystal diamonds[J]. Diamond & Related Materials, 2011, 20(4): 496-500.
[21] 赵玉成,邢广忠,王明智,等.金刚石中应力的定量测量与应用[J].人工晶体学报,2006,35(2):359-362.
[22] PAL K S, MALLIK A K, DANDAPAT N, et al. Microscopic properties of MPCVD diamond coatings studied by micro-Raman and micro-photoluminescence spectroscopy[J]. Bulletin of Materials Science, 2015, 38(2): 537-549.
[23] 吕反修.金刚石膜制备与应用-上卷[M].北京:科学出版社,2014.
[24] LYON S A, NEMANICH R J, JOHNSON N M, et al. Microstrain in laser-crystallized silicon islands on fused silica[J]. Applied Physics Letters, 1982, 40(4): 316-318.
[25] MITSUHASHI M, KARASAWA S, OHYA S, et al. Dislocation of epitaxial CVD diamond and the characterization by Raman spectroscopy[J]. Applied Surface Science, 1992, 60/61: 565-572.
[26] STUART S A, PRAWER S, WEISER P S. Growth-sector dependence of fine structure in the first-order Raman diamond line from large isolated chemical-vapor-deposited diamond crystals[J]. Applied Physics Letters, 1993, 62(11): 1227-1229.
[27] KARASAWA S, MITSUHASHI M, OHYA S, et al. Crystal growth of epitaxial CVD diamond using 13C isotope and characterization of dislocations by Raman spectroscopy[J]. Journal of Crystal Growth, 1993, 128(1/2/3/4): 403-407.
[28] BAR-YAM Y, MOUSTAKAS T D. Defect-induced stabilization of diamond films[J]. Nature, 1989, 342(6251): 786-787.
[29] KNIGHT D S, WHITE W. Characterization of diamond films by Raman spectroscopy[J]. Journal of Materials Research, 1989, 4: 385-393.
[30] 张 青,翁 俊,刘 繁,等.高功率微波等离子体对单晶金刚石同质外延生长的影响[J].表面技术,2022,51(6):364-373+398.
[31] 屠菊萍,刘金龙,邵思武,等.高质量单晶金刚石的合成、结构与光学性能研究[J].光学学报,2020,40(6):205-212.
[32] YIMING Z, LARSSON F, LARSSON K. Effect of CVD diamond growth by doping with nitrogen[J]. Theoretical Chemistry Accounts, 2014, 133(2): 1432.
[33] INSPEKTOR A, LIOU Y, MCKENNA T, et al. Plasma CVD diamond deposition in C-H-O systems[J]. Surface and Coatings Technology, 1989, 39/40: 211-221.
贾元波, 满卫东, 伍正新, 梁凯, 林志东. 二氧化碳对同质外延生长单晶金刚石内应力的影响[J]. 人工晶体学报, 2023, 52(1): 34. JIA Yuanbo, MAN Weidong, WU Zhengxin, LIANG Kai, LIN Zhidong. Effect of Carbon Dioxide on Internal Stress of Single Crystal Diamond Grown by Homogeneous Epitaxy[J]. Journal of Synthetic Crystals, 2023, 52(1): 34.