基于电感耦合等离子体刻蚀的LNOI脊形微结构制备
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吴玉航, 杨忠华, 孟雪飞, 宋泽乾, 刘文, 罗文博, 张万里. 基于电感耦合等离子体刻蚀的LNOI脊形微结构制备[J]. 压电与声光, 2023, 45(2): 239. WU Yuhang, YANG Zhonghua, MENG Xuefei, SONG Zeqian, LIU Wen, LUO Wenbo, ZHANG Wanli. Fabrication of LNOI Ridge Microstructure Based on Inductively Coupled Plasma Etching[J]. Piezoelectrics & Acoustooptics, 2023, 45(2): 239.