中国激光, 2008, 35 (10): 1579, 网络出版: 2008-10-24   

超短脉冲激光烧蚀金属薄膜材料的热效应分析

Thermal Effect Analysis of Metal Film Ablation by Ultra-Short Laser Pulses
作者单位
四川大学电子信息学院,四川 成都 610064
摘要
基于双曲双温两步热传导模型,利用具有人工粘性和自适应步长的有限差分算法,对超短脉冲激光辐照金膜时的温度场进行了一维数值模拟计算。讨论了不同能量密度和脉冲宽度条件下金膜表面温度场的分布情况; 分析了电子-晶格耦合系数对薄膜体内温度场的变化规律及电子-晶格耦合至热平衡所需时间的影响。结果表明, 激光脉冲的能量密度和脉冲宽度对电子温度的峰值有重大影响; 电子-晶格的耦合系数决定了二者的温升速率和耦合时间; 电子温度及电子温度的梯度在接近表面区域迅速达到最大值,与之相应的热电子崩力是造成金属薄膜早期力学损伤的主要原因。
Abstract
Based on the dual-hyperbolic two-temperature and double-step heat conduction model ,numerical simulation for the electron and lattice temperatures field of gold film is performed by ultra-short laser pulses, using the finite-difference method with viscosities and adaptive time steps. The temperature distributions of the electron and lattice at the front surface with different laser intensities and pulse widths were discussed. Simultaneously, it is also analyzed that the effect of the electron- lattice coupling coefficient on the change of electron-lattice temperature and the time of electron-lattice coupling to thermal equilibrium. Numerical results show that the laser intensity and pulse width impact significantly on the peak of the electron temperature, and electron lattice temperature rising rate and coupling time are determined by the coupling factor. Eectron temperature and its gradient quickly reach the maximum in a small region near the irradiated surface, corresponding with high hot-electron blast force, which could be a dominating mechanism for mechanical damage at the early stage of ultra-short laser ablation.
参考文献

[1] . Fork , C. Cruz , P. C. Becker et al.. Compression of optical pulses to six femtoseconds by using cubic phase compensation[J]. Opt . Lett, 1987, 12(7): 483-485.

[2] . Momma, S. Note, B. N. Chichkovet al.. Precise laser ablation with ultrashort pulses[J]. Appl. Surf. Sci, 1997, 109: 15-19.

[3] . D. Shirk, P. A. Molian. A review of ultrashort pulsed laser ablation of materials[J]. J. Laser. Appl., 1998, 10(1): 18-28.

[4] . Momma, B. N. Chichkov, S. Nolte et al.. Short pulse ablation of solid targets[J]. Opt. Commun., 1996, 129: 134-142.

[5] . Vofel, J. Noack, G. Hüttman et al.. Mechanisms of femtosecond laser nano-surgery of cells and tissues[J]. Appl. Phys. B, 2005, 81: 1015-1047.

[6] 何飞,程亚。飞秒激光加工:激光精密加工领域的新前沿[J].中国激光, 2007,34(5): 595~622

    He Fei, Cheng Ya. Femtosecond laser micromaching : frontier in laser precision micromaching[J]. Chinese J. Lasers , 2007, 34(5):595~622

[7] . P. Pronk, S. K. Dutta, J. Squier. Machining of sub-micron holes using a femtosecond laser at 800 nm[J]. Opt. Commun., 1995, 114: 106-110.

[8] 孟宪赓, 赵崇军, 邱建荣. 飞秒激光在金属纳米材料制备和材料微结构加工中的应用[J] . 激光与光电子学进展, 2004 , 41(4) :48~52

    Meng Xiangeng, Zhao Chongjun, Qiu Jianrong. Applicationsof femtosecond laser in preparation of metal nanoparticles and material micro-processing [J] .Laser&Optoelectronics Progress, 2004, 41 (4) :48~52

[9] . I. Anisimov, B. L. Kapaliovich, T. L. Perelman et al. .Electron emission from metal surface exposed to ultra-short pulse[J]. Sov. Phys. JETP, 1974, 39(2): 375-378.

[10] . Y.Tzou , K. S. Chiu. Temperature-dependent thermal lagging in ultrafast laser heating[J]. Int. J. Heat and Mass Tansfer, 2001, 44: 1725-1734.

[11] . Q. Qiu, C. L. Tien. Heat transfer mechanisms during short-pulse laser heating of metals[J]. J. Heat Transfer, 1993, 115: 835-841.

[12] . Y. Tzou, J. K. Chen, J. E. Beraum. Hot-electron blast induced by ultrashort- pulsed lasers in layered media[J]. Int. J. Heat Mass.Transfer, 2002, 45: 3369-3382.

[13] . K. Chen, J.E. Beraun, D.Y. Tzou. Thermomechanical response of metal films heated by ultrashort-pulsed lasers[J]. J. Thermal Stresses, 2002, 25: 539-558.

[14] 李玉华, 马法君, 戴能利等. 超短脉冲激光对无机硅材料的损伤[J].中国激光. 2007, 34 (7):1009~1013

    Li Yuhua, Ma Fajun, Dai Nengli et al.. Ultra-short pulsed laser-induced damage in inorganic silicon materials[J] .Chinese J . Lasers , 2007,34 (7):1009~1013

[15] 倪晓昌,王清月。 飞秒、皮秒激光烧蚀金属表面的有限差分热分析[J].中国激光,2004,31(3):277~280

    Ni Xiaochang, Wang Qingyue. Finite difference method for thermal analysis of femtosecond-picosecond pulse laser ablation on metal surface[J].Chinese J. Lasers , 2004,31(3):277~280

[16] 郝秋龙,齐文宗,刘全喜等。超短脉冲激光辐照金属薄膜温升效应的模拟研究[J]. 强激光与粒子束, 2006, 18(6):908~912

    Hao Qiulong, Qi Wenzong, Liu Quanxi et al.. Simulation study on thermal effect on metal films irradiated by ultra-short pulse laser[J]. High Power Laser and Particle Beams, 2006,18(6): 908~912

[17] . Tsai. Modeling of ultra-short laser pulse-train processing of metal thin films[J]. Int . J. Heat and Mass Transfer, 2007, 50: 3461-3470.

[18] . K. Chen,J.E. Beraun,C.L.Than.Ultrafast thermoelasticity for short-pulse laser heating[J]. Int.J.Engineering Science, 2004, 42: 793-807.

[19] . S. Wellershoff, J. Hohfeld, J. Gudde et al.. The role of electron-phonon coupling in femtosecond laser damage of metals[J]. Appl.Phys.A, 1999, 69: S99-S107.

[20] . Yang, Y. Zhao, X. Zhu. Transition between non-thermal and thermal ablation of metallic targets under the strike of high-fluence ultra-short laser pulses[J]. Appl. Phys. Lett., 2006, 88(9): 094101.

王德飞, 于继平, 郭春凤, 齐文宗. 超短脉冲激光烧蚀金属薄膜材料的热效应分析[J]. 中国激光, 2008, 35(10): 1579. Wang Defei, Yu Jiping, Guo Chunfeng, Qi Wenzong. Thermal Effect Analysis of Metal Film Ablation by Ultra-Short Laser Pulses[J]. Chinese Journal of Lasers, 2008, 35(10): 1579.

本文已被 5 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!