半导体激光器腔面增透膜AlN薄膜的制备
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周路, 王云华, 贾宝山, 白端元, 张斯钰, 乔忠良, 高欣, 薄报学. 半导体激光器腔面增透膜AlN薄膜的制备[J]. 发光学报, 2011, 32(12): 1292. ZHOU Lu, WANG Yun-hua, JIA Bao-shan, BAI Duan-yuan, ZHANG Si-yu, QIAO Zhong-liang, GAO Xin, BO Bao-xue. Deposition of AlN Film for AR Coating of Semiconductor Lasers[J]. Chinese Journal of Luminescence, 2011, 32(12): 1292.