宽束冷阴极离子源离子能量及能量分布的研究
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徐均琪, 弥谦, 杭凌侠, 严一心, 董网妮. 宽束冷阴极离子源离子能量及能量分布的研究[J]. 光电工程, 2008, 35(6): 23. XU Jun-qi, MI Qian, HANG Ling-xia, YAN Yi-xin, DONG Wang-ni. Ion Energy and Energy Distribution of the Broad Beam Cool Cathode Ion Source[J]. Opto-Electronic Engineering, 2008, 35(6): 23.
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