红外与激光工程, 2015, 44 (4): 1335, 网络出版: 2016-01-26   

Si 间隔层对Al(1 wt.%Si)/Zr 极紫外多层膜热稳定的作用研究(英文)

Effect of Si barrier layers on the thermal stability of Al(1 wt.%Si)/Zr multilayers designed as EUV mirrors
作者单位
同济大学物理科学与工程学院精密光学工程技术研究所 先进微结构材料教育部重点实验室,上海 200092
引用该论文

李嘉, 朱杰, 张众, 齐润泽, 钟奇, 王占山. Si 间隔层对Al(1 wt.%Si)/Zr 极紫外多层膜热稳定的作用研究(英文)[J]. 红外与激光工程, 2015, 44(4): 1335.

Li Jia, Zhu Jie, Zhang Zhong, Qi Runze, Zhong Qi, Wang Zhanshan. Effect of Si barrier layers on the thermal stability of Al(1 wt.%Si)/Zr multilayers designed as EUV mirrors[J]. Infrared and Laser Engineering, 2015, 44(4): 1335.

参考文献

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李嘉, 朱杰, 张众, 齐润泽, 钟奇, 王占山. Si 间隔层对Al(1 wt.%Si)/Zr 极紫外多层膜热稳定的作用研究(英文)[J]. 红外与激光工程, 2015, 44(4): 1335. Li Jia, Zhu Jie, Zhang Zhong, Qi Runze, Zhong Qi, Wang Zhanshan. Effect of Si barrier layers on the thermal stability of Al(1 wt.%Si)/Zr multilayers designed as EUV mirrors[J]. Infrared and Laser Engineering, 2015, 44(4): 1335.

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