红外与激光工程, 2015, 44 (4): 1335, 网络出版: 2016-01-26
Si 间隔层对Al(1 wt.%Si)/Zr 极紫外多层膜热稳定的作用研究(英文)
Effect of Si barrier layers on the thermal stability of Al(1 wt.%Si)/Zr multilayers designed as EUV mirrors
补充材料
李嘉, 朱杰, 张众, 齐润泽, 钟奇, 王占山. Si 间隔层对Al(1 wt.%Si)/Zr 极紫外多层膜热稳定的作用研究(英文)[J]. 红外与激光工程, 2015, 44(4): 1335. Li Jia, Zhu Jie, Zhang Zhong, Qi Runze, Zhong Qi, Wang Zhanshan. Effect of Si barrier layers on the thermal stability of Al(1 wt.%Si)/Zr multilayers designed as EUV mirrors[J]. Infrared and Laser Engineering, 2015, 44(4): 1335.