Si 间隔层对Al(1 wt.%Si)/Zr 极紫外多层膜热稳定的作用研究（英文）

李嘉; 朱杰; 张众; 齐润泽; 钟奇; 王占山

红外与激光工程, 2015, 44 (4): 1335, 网络出版: 2016-01-26

Si 间隔层对Al(1 wt.%Si)/Zr 极紫外多层膜热稳定的作用研究（英文）

Effect of Si barrier layers on the thermal stability of Al(1 wt.%Si)/Zr multilayers designed as EUV mirrors

论文大纲

李嘉 ^*朱杰张众齐润泽钟奇王占山

作者单位

同济大学物理科学与工程学院精密光学工程技术研究所先进微结构材料教育部重点实验室，上海 200092

Al/Zr多层膜热稳定性 Si间隔层合金界面层模型 Al/Zr multilayers thermal stability Si barrier layer alloy-interlayer model

摘要

为了提升Al/Zr多层膜的热稳定性，采用直流磁控溅射方法制备了18个带有不同厚度Si间隔层的Al(1 wt.%Si)/Zr多层膜，并将这些样品分别进行了不同温度(100~500 ℃）的真空退火，退火时间为1 h。利用X射线掠入射反射(GIXR)和X射线衍射(XRD)的方法来研究Si间隔层对Al/Zr多层膜热稳定性的作用。GIXR测量结果表明：随着Si间隔层厚度的增大，Al膜层的粗糙度减小，而Zr膜层的粗糙度增大；XRD测量结果表明：Al和Zr膜层粗糙度的变化是由于退火后膜层中晶粒尺寸不同造成的。相比于没有Si间隔层的Al/Zr多层膜，引入厚度为0.6 nm的Si间隔层可以有效提升Al/Zr多层膜的热稳定性。

Abstract

To improve the thermal stability of Al/Zr multilayers, eighteen Al(1 wt.%Si)/Zr multilayers with different thickness(0.4 nm, 0.6 nm and 0.8 nm) of Si barrier layers were prepared by using the direct-current magnetron sputtering system. All the multilayers were annealed from 100 ℃ to 500 ℃ in a vacuum furnace for 1 h. To evaluate the effect of Si barrier layers on the thermal stability of Al/Zr system, the multilayers were characterized by grazing incidence X-ray reflectance(GIXR) and X-ray diffraction (XRD). From the alloy-interlayer model in the GIXR, the roughness of Al layer decreases with increasing thickness of Si barrier layers, while the roughness of Zr layer increases. Based on the XRD, the changing trends of crystal sizes of Al and Zr can explain the results in the GIXR. Comparing with the multilayers without Si barrier layers in the annealing process, the sample with Si barrier layer(0.6 nm) have better structural performance, of which the multilayers could have a stable structural performance above 300 ℃.国家自然科学基金委员会与中国工程物理研究院联合基金资助(U1430131)；上海市科委纳米项目(11nm0507200)

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李嘉, 朱杰, 张众, 齐润泽, 钟奇, 王占山. Si 间隔层对Al(1 wt.%Si)/Zr 极紫外多层膜热稳定的作用研究（英文）[J]. 红外与激光工程, 2015, 44(4): 1335. Li Jia, Zhu Jie, Zhang Zhong, Qi Runze, Zhong Qi, Wang Zhanshan. Effect of Si barrier layers on the thermal stability of Al(1 wt.%Si)/Zr multilayers designed as EUV mirrors[J]. Infrared and Laser Engineering, 2015, 44(4): 1335.

Si 间隔层对Al(1 wt.%Si)/Zr 极紫外多层膜热稳定的作用研究（英文）

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