光学学报, 2017, 37 (1): 0112005, 网络出版: 2017-01-13   

干涉测量圆柱内表面的失调误差分析

Misalignment Analysis of Cylindrical Inner Surfaces in Interferometric Measurement
孙昊 1,2,*韩森 2,3唐寿鸿 2王芳 2,3殷留留 2,3
作者单位
1 长春理工大学光电工程学院, 吉林 长春 130022
2 苏州慧利仪器有限责任公司, 江苏 苏州 215123
3 上海理工大学光电信息与计算机工程学院, 上海 200093
摘要
通过菲佐型干涉系统、直角圆锥反射镜的一次性测量, 可获得圆柱形光学元件整周的面形信息。为实现高精度的面形测量, 实验装置的校准至关重要, 但由于调整机构的缺陷导致圆锥反射镜和被测圆柱的空间方位难以确定, 距离理想位置的任何位置偏差将给测量结果引入严重的测量误差。为去除该系统误差, 要明确各种失调误差的形成原因, 分析其对测量结果的影响。通过圆柱坐标系下数学模型的建立, 推导出偏移误差和旋转误差的变化公式, 并通过Matlab数值模拟和实际测量对其进行验证。结果表明, 利用误差计算公式可以推导出失调误差系数, 便于进一步的系统误差校正。
Abstract
Information of the entire cylindrical inner surfaces can be achieved by using a Fizeau interference system and a 90° conical mirror in a one-time measurement. In order to achieve high-precision surface measurement, the alignment of experimental apparatus is very crucial. However, defects of the alignment may cause the spatial orientation of the cone mirror and the tested cylinder difficult to determine, and any misplacement from ideal location may result in large measurement errors. Therefore, to remove the system errors, the reasons of all kinds of misalignment should be well understood and their influences on the measurement results should be analyzed. By establishing the mathematical model in cylindrical coordinate, the change formula of offset error and rotational error is deduced. The formula is verified by numerical simulation of Matlab software and practical measurement. The results show that the misalignment error coefficient can be successfully derived with the proposed formula, which will further benefit system error correction.
参考文献

[1] 孙侠菲, 余景池, 丁泽钊, 等. 超光滑硅柱面反射镜的加工和检测[J]. 光学技术, 2001, 27(6): 497-498.

    Sun Xiafei, Yu Jingchi, Ding Zezhao, et al. Fabrication and testing of the super-smooth silicon cylindrical mirror[J]. Optical Technique, 2001, 27(6): 497-498.

[2] 上官王聘. 大功率半导体激光器阵列光束整形系统研究[D]. 杭州: 浙江大学, 2011.

    Shangguan Wangpin. Study on the system of beam shaping for high-power laser diodearray[D]. Hangzhou: Zhejiang University, 2011.

[3] 谢洪波, 吕二阳, 祝晓晨, 等. 一种激光二极管像散光束准直整形方法研究[J]. 激光技术, 2013, 37(4): 551-555.

    Xie Hongbo, Lü Eryang, Zhu Xiaochen, et al. Shaping and collimation of LD beam with astigmatism[J]. Laser Technology, 2013, 37(4): 551-555.

[4] Geary J M. Overview of cylindrical optics testing using a fiber optic reference[C]. SPIE, 1995, 2536: 68-74.

[5] Lindlein N, Schreiner R, Brinkmann S, et al. Axicon-type test interferometer for cylindrical surfaces: Systematic error assessment[J]. Applied Optics, 1997, 36(13): 2791-2795.

[6] Reardon P J, Liu F, Geary J M. Schmidt-like corrector plate for cylindrical optics[J]. Optical Engineering, 2010, 49(5): 0530021.

[7] Tam P W, Gross K P, Bogan J R. Interferometric testing of cylinder optics using computer generated hologram (CGH)[C]. SPIE, 1997, 3134: 162-166.

[8] Dresel T, Brinkmann S, Schreiner R, et al. Testing of rod objects by grazing incidence interferometry: theory[J]. Journal of the Optical Society of America A, 1998, 15(11): 2921-2928.

[9] Mantel K, Lamprecht J, Lindlein N, et al. Absolute calibration in grazing incidence interferometry via rotational averaging[J]. Optics, 2006, 45(16): 3740-3745.

[10] Schwider J, Lindlein N, Schreiner R, et al. Grazing-incidence test for cylindrical microlenses with high numerical aperture[J]. Journal of Optics A, 2002, 4(4): S10-S16.

[11] Chekal V N, Chudakov Y I, Shevtsov S E. The use of coordinate-measurement machines to optimize the technology of automatic shaping of optical surfaces[J]. Journal of Optical Technology C, 2008, 75(11): 755-759.

[12] Lamprecht J, Lindlein N, Schwider J. Null test measurement of high-numerical aperture cylindrical micro lenses in transmittedlight[C]. SPIE, 2003, 5180: 253-260.

[13] Mantel K, Lindlein N, Schwider J. Simultaneous characterization of the quality and orientation of cylindrical lens surfaces[J]. Applied Optics, 2005, 44(15): 2970-2977.

[14] Kang G G, Xie J H, Liu Y. New design techniques and alignment methods for CGH-null testing of asphericsurface[C]. SPIE, 2008,6624: 66240K.

[15] 黄 亚, 马 骏, 朱日宏, 等. 基于计算全息的光学自由曲面测量不确定度分析[J]. 光学学报, 2015, 35(11): 1112007.

    Huang Ya, Ma Jun, Zhu Rihong, et al. Investigation of measurement uncertainty of optical freeform surface based on computer-generated hologram[J]. Acta Optica Sinica, 2015, 35(11): 1112007.

[16] 于瀛洁, 许海峰, 彭军政. 柱面面形干涉测量[J]. 计量学报, 2015, 36(5): 460-463.

    Yu Yingjie, Xu Haifeng, Peng Junzheng. The interferometric method for the cylindricalsurface[J]. Acta Metrologica Sinica, 2015, 36(5): 460-463.

[17] 张 磊, 田 超, 刘 东, 等. 非球面非零位环形子孔径拼接干涉检测技术[J]. 光学学报, 2014, 34(8): 0812003.

    Zhang Lei, Tian Chao, Liu Dong, et al. Non-null annular subaperture stitching interferometry for aspheric test[J]. Acta Optica Sinica, 2014, 34(8): 0812003.

[18] 海云飞. 远心光学测量系统的物体边缘反射模型及其位置检测方法[D]. 成都: 电子科技大学, 2015.

    Hai Yunfei. Research of the reflection model of the edge of objects and a method ofmeasurement[D]. Chengdu: University of Electronic Science and Technology of China, 2015.

[19] Viotti M R, Albertazzi A, Pont A D, et al. A novel algorithm to stitch adjacent cloud of points of long cylindrical surfaces[J]. SPIE, 2007, 6616: 66161E.

[20] Wyant J C, Creath K. Basic wavefront aberration theory for optical metrology[M]// Shannon R R, Wyant J M. Applied Optics and Optical Engineering. Newyork: Academic Press, 1992.

[21] Mahajan V N. Zernike polynomials and wavefront fitting[M]// Daniel M. Optical Shop Testing. New Jersey: Wiley, 2007.

孙昊, 韩森, 唐寿鸿, 王芳, 殷留留. 干涉测量圆柱内表面的失调误差分析[J]. 光学学报, 2017, 37(1): 0112005. Sun Hao, Han Sen, Tang Shouhong, Wang Fang, Yin Liuliu. Misalignment Analysis of Cylindrical Inner Surfaces in Interferometric Measurement[J]. Acta Optica Sinica, 2017, 37(1): 0112005.

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