用于扫描干涉场曝光的超精密微动台设计与控制 下载: 821次
鲁森, 杨开明, 朱煜, 王磊杰, 张鸣, 杨进. 用于扫描干涉场曝光的超精密微动台设计与控制[J]. 光学学报, 2017, 37(10): 1012006.
Sen Lu, Kaiming Yang, Yu Zhu, Leijie Wang, Ming Zhang, Jin Yang. Design and Control of Ultra-Precision Fine Positioning Stage for Scanning Beam Interference Lithography[J]. Acta Optica Sinica, 2017, 37(10): 1012006.
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鲁森, 杨开明, 朱煜, 王磊杰, 张鸣, 杨进. 用于扫描干涉场曝光的超精密微动台设计与控制[J]. 光学学报, 2017, 37(10): 1012006. Sen Lu, Kaiming Yang, Yu Zhu, Leijie Wang, Ming Zhang, Jin Yang. Design and Control of Ultra-Precision Fine Positioning Stage for Scanning Beam Interference Lithography[J]. Acta Optica Sinica, 2017, 37(10): 1012006.