基于塔尔博特自成像光刻机的照明系统设计与分析 下载: 1202次
[1] Solak H H, Dais C, Clube F. Displacement Talbot lithography: A new method for high-resolution patterning of large areas[J]. Optics Express, 2011, 19(11): 10686-10691.
[2] Solak H H, Ekinci Y. Achromatic spatial frequency multiplication: A method for production of nanometer-scale periodic structures[J]. Journal of Vacuum Science & Technology B, 2005, 23(6): 2705-2710.
[3] 张宝昊, 周素梅, 杨晓铭, 等. 方形孔径微透镜阵列的塔尔博特效应[J]. 光学学报, 2016, 36(5): 0523001.
[4] 司新春, 佟军民, 唐 燕, 等. 基于二维Ronchi光栅的纳米光刻对准技术研究[J]. 中国激光, 2015, 42(9): 0910001.
[5] Talbot H F. Facts relating to optical science No. IV[J]. Philosophical Magazine, 1836, 9(56): 401-407.
[6] 郁道银, 谈恒英. 工程光学[M]. 二版. 北京: 机械工业出版社, 2006.
Yu Daoyin, Tan Hengying. Optical engineering[M]. 2nd ed. Beijing: China Machine Press, 2006.
[7] 赵 阳. 深紫外光刻复杂照明光学系统设计[D]. 长春: 中国科学院长春光学精密机械与物理研究所, 2010: 21-22.
Zhao Yang. Design of complex illumination optical system for deep ultraviolet lithography[D]. Changchun: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2010: 21-22.
[8] Welford W T, Winston R. The optics of nonimaging concentrators: Light and solar energy[J]. Physics Today, 1980, 33(6): 56-57.
[9] 罗 毅, 张贤鹏, 王 霖, 等. 半导体照明中的非成像光学及其应用[J]. 中国激光, 2008, 35(7): 963-971.
[10] 金 骥, 余桂英, 林 敏. 基于非成像光学的LED高收光率的抛物反射器研究[J]. 中国激光, 2010, 37(3): 680-684.
[11] Ries H, Muschaweck J. Tailored freeform optical surfaces[J]. Journal of The Optical Society of America A, 2002,19(3): 590-595.
[12] 邢莎莎, 冉英华, 江海波, 等. 基于微反射镜阵列的光刻照明模式变换系统设计[J]. 光学学报, 2015, 35(11): 1111002.
佟军民, 刘俊伯, 胡松. 基于塔尔博特自成像光刻机的照明系统设计与分析[J]. 激光与光电子学进展, 2017, 54(8): 082201. Tong Junmin, Liu Junbo, Hu Song. Design and Analysis of Illumination System of Talbot Self-Imaging Lithographic Equipment[J]. Laser & Optoelectronics Progress, 2017, 54(8): 082201.