IGZO-TFT钝化层三元复合结构过孔刻蚀
田茂坤, 董晓楠, 黄中浩, 王骏, 王思江, 赵永亮, 闵泰烨, 袁剑峰, 孙耒来, 谌伟, 王恺, 吴旭. IGZO-TFT钝化层三元复合结构过孔刻蚀[J]. 液晶与显示, 2019, 34(6): 564.
TIAN Mao-kun, DONG Xiao-nan, HUANG Zhong-hao, WANG Jun, WANG Si-jiang, ZHAO Yong-liang, MIN Tai-ye, YUAN Jian-feng, SUN Lei-lai, CHEN Wei, WANG Kai, WU Xu. Ternary composites of passivation layer for hole plasma etching of IGZO-TFT[J]. Chinese Journal of Liquid Crystals and Displays, 2019, 34(6): 564.
田茂坤, 董晓楠, 黄中浩, 王骏, 王思江, 赵永亮, 闵泰烨, 袁剑峰, 孙耒来, 谌伟, 王恺, 吴旭. IGZO-TFT钝化层三元复合结构过孔刻蚀[J]. 液晶与显示, 2019, 34(6): 564. TIAN Mao-kun, DONG Xiao-nan, HUANG Zhong-hao, WANG Jun, WANG Si-jiang, ZHAO Yong-liang, MIN Tai-ye, YUAN Jian-feng, SUN Lei-lai, CHEN Wei, WANG Kai, WU Xu. Ternary composites of passivation layer for hole plasma etching of IGZO-TFT[J]. Chinese Journal of Liquid Crystals and Displays, 2019, 34(6): 564.
PDF全文
