薄板陶瓷微孔的激光加工工艺研究

主要研究薄板陶瓷微孔的激光精密加工工艺。具体采用CO2、光纤激光器以脉冲打孔和切割技术，通过优化激光器功率、占空比、重复频率、离焦量、辅助气体类型、气压等工艺参数，旨在改善激光加工陶瓷微孔的热影响、锥度和提高激光加工效率满足工业应用的要求。实验结果表明：采用CO2激光能够加工出孔径为80~200 μm的微孔，其效率达18 hole/s，热影响也得到了明显改善；而采用光纤激光单脉冲方式打孔速度达300 hole/s，其微孔锥度可控；切割方式打孔速度达6~8 hole/s，且能够获得孔径为100 μm的直微孔的稳定激光微加工。

Abstract

The laser precision micromachining processes on the thin ceramic plate are investigated. By taking pulse laser drilling as well as laser cutting technology, this work aims at improving the heat affected zone of laser processing as well as the conicity of microhole and increasing laser processing efficiency to satisfy the industrial requirement. The laser process parameters including laser output power, duty cycle, repeated frequency, the offset of focus spot, the type of assistant gas and gas pressure are optimized in the experiments. The results show that the microholes with diameter of 80~200 μm are obtained by using CO2 laser drilling on ceramic plate and its efficiency up to 18 hole/s; the heat affected zone has also been significantly improved. The conicity controllable microholes are achieved by single pulse drilling technology with fiber laser and its efficiency achieves 300 hole/s. The stable laser precision micromachining on the ceramics for the straight microholes with diameter of 100 μm is also obtained by laser cutting technology using fiber laser and its efficiency achieves 6~8 hole/s.

参考文献

[1] 罗志海, 杨润泽. 工程陶瓷加工技术的现状与发展[J]. 陶瓷, 2010, (10): 7-10.

Luo Zhihai, Yang Runze. Present condition & developments of machining technologies engineering ceramics [J]. Ceramic, 2010, (10): 7-10.

[2] 张保国, 田欣利, 佘安英, 等. 工程陶瓷材料激光加工原理及应用研究进展[J]. 现代制造工程, 2012, (10): 5-10.

Zhang Baoguo, Tian Xinli, She Anying, et al.. Research progress on principle and application of laser machining for engineeringceramics [J]. Modern Manufacturing Engineering, 2012, (10): 5-10.

[3] 邵丹, 胡兵, 郑启光. 激光先进制造技术与设备集成[M]. 北京: 科学出版社, 2009.

Shao Dan, Hu Bing, Zheng Qiguang. Laser Advanced Manufacturing Technology and Equipment Integration [M]. Beijing: Science Press, 2009.

[4] 闫胤洲, 季凌飞, 鲍勇, 等. 激光加工陶瓷裂纹行为的理论分析及实验验证[J]. 中国激光, 2008, 35(9): 1401-1408.

Yan Yinzhou, Ji Lingfei, Bao Yong, et al.. Theory analysis and experiment verification on crack characters during laser processing ceramics [J]. Chinese J Lasers, 2008, 35(9): 1401-1408.

[5] 周继烈, 程耀东. 结构陶瓷激光加工的热应力分析[J]. 浙江大学学报(工学版), 2004, 38(9): 1204-1207.

Zhou Jilie, Cheng Yaodong. Thermal stress analysis for structural ceramics during laser beam machining [J]. Journal of Zhejiang University (Engineering Science), 2004, 38(9): 1204-1207.

[6] 史进, 李海涛, 杨贺来, 等. 激光陶瓷打孔微裂纹现象理论研究[J]. 机械设计与制造, 2006, (2): 93-94.

Shi Jin, Li Haitao, Yang Helai, et al.. The theoretical research on the microcrack of ceramic material of laser drilling [J]. Machinery Design & Manufacture, 2006, (2): 93-94.

[7] 闫胤洲, 季凌飞, 鲍勇, 等. 高硬脆陶瓷激光加工技术的研究及进展[J]. 激光杂志, 2008, 29(6): 5-8.

Yan Yinzhou, Ji Lingfei, Bao Yong, et al.. Research and developments of laser processing ceramics technique [J]. Laser Journal, 2008, 29(6): 5-8.

[8] 史进, 杨贺来, 张晓兵. 陶瓷小孔激光精密加工新方法应用研究[J]. 应用激光, 2005, 25(3): 155-157.

Shi Jin, Yang Helai, Zhang Xiaobing. Application study on new method of laser precise drilling of ceramic material [J]. Applied Laser, 2005, 25(3): 155-157.

[9] 史进, 张晓兵, 杨贺来. 陶瓷喷嘴NdYAG激光精密打孔应用研究[J]. 机械制造, 2005, 43(8): 36-38.

Shi Jin, Zhang Xiaobing, Yang Helai. Ceramic nozzle NdYAG laser precision drilling applied research [J]. Machinery Manufacturing, 2005, 43(8): 36-38.

[10] 陈可心, 王卫乡, 张有, 等. 用连续波CO2激光对氮化硅陶瓷打孔的实验研究[J]. 华南师范大学学报(自然科学版), 2000, (1): 59-62.

Chen Kexin, Wang Weixiang, Zhang You, et al.. Experimental investigation on laser of Si3N4 ceramics with CW CO2 laser [J]. Journal of South China Normal University (Natural Science), 2000, (1): 59-62.

肖磊, 赵建涛, 闫振峰, 姚勇. 薄板陶瓷微孔的激光加工工艺研究[J]. 光学学报, 2014, 34(s1): s114012. Xiao Lei, Zhao Jiantao, Yan Zhenfeng, Yao Yong. Technologic Investigation of Laser Micro-Drilling on the Thin Ceramic Plate[J]. Acta Optica Sinica, 2014, 34(s1): s114012.

薄板陶瓷微孔的激光加工工艺研究

关于本站 Cookie 的使用提示

全站搜索

薄板陶瓷微孔的激光加工工艺研究

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索