中国激光, 2017, 44 (9): 0905002, 网络出版: 2017-09-07
扫描干涉场曝光系统光斑尺寸与光路设计 
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Design of Spot Size and Optical Path in Scanning Beam Interference Lithography System
图 & 表
图 3. 理想状态下不同束腰半径对应的干涉场非线性误差。(a) 0.5 mm;(b) 1.0 mm;(c) 2.0 mm;(d) 5.0 mm
Fig. 3. Nonlinear error of interference field with different waist radii in ideal condition. (a) 0.5 mm; (b) 1.0 mm; (c) 2.0 mm; (d) 5.0 mm
图 4. 存在20 μm失调量时干涉条纹的非线性误差。(a) 0.5 mm;(b) 1.0 mm;(c) 2.0 mm;(d) 5.0 mm
Fig. 4. Nonlinear error of interference fringe with misalignment of 20 μm. (a) 0.5 mm; (b) 1.0 mm; (c) 2.0 mm; (d) 5.0 mm
图 5. 存在100 μm失调量时干涉条纹的非线性误差。(a) 0.5 mm;(b) 1.0 mm;(c) 2.0 mm;(d) 5.0 mm
Fig. 5. Nonlinear error of interference fringe with misalignment of 100 μm. (a) 0.5 mm; (b) 1.0 mm; (c) 2.0 mm; (d) 5.0 mm
图 6. 光栅刻线误差随干涉场束腰半径的变化
Fig. 6. Variation of grating line error with waist radius of interference field
图 7. 一定周期误差下曝光对比度随(a)步进间隔和(b)干涉场束腰半径的变化
Fig. 7. Variation of exposure contrast with (a) step interval and (b) waist radius of interference field at certain period error
图 9. 左右曝光光斑形貌图。(a)左侧;(b)右侧
Fig. 9. Morphologies of left and right exposure spots. (a) Left side; (b) right side
图 11. 五步相移干涉图像。(a) 0;(b) π/2;(c) π;(d) 3π/2;(e) 2π
Fig. 11. Interference patterns of five-step phase shifting. (a) 0; (b) π/2; (c) π; (d) 3π/2; (e) 2π
表 1不同失调量对干涉条纹非线性误差的影响
Table1. Effect of misalignment on nonlinear error of interference fringenm
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王玮, 姜珊, 宋莹, 巴音贺希格. 扫描干涉场曝光系统光斑尺寸与光路设计[J]. 中国激光, 2017, 44(9): 0905002. Wang Wei, Jiang Shan, Song Ying, Bayanheshig. Design of Spot Size and Optical Path in Scanning Beam Interference Lithography System[J]. Chinese Journal of Lasers, 2017, 44(9): 0905002.
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