扫描干涉场曝光系统光斑尺寸与光路设计 下载: 865次
王玮, 姜珊, 宋莹, 巴音贺希格. 扫描干涉场曝光系统光斑尺寸与光路设计[J]. 中国激光, 2017, 44(9): 0905002.
Wang Wei, Jiang Shan, Song Ying, Bayanheshig. Design of Spot Size and Optical Path in Scanning Beam Interference Lithography System[J]. Chinese Journal of Lasers, 2017, 44(9): 0905002.
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