ZrO2薄膜残余应力实验研究
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邵淑英, 范正修, 范瑞瑛, 邵建达. ZrO2薄膜残余应力实验研究[J]. 光学学报, 2004, 24(4): 437. 邵淑英, 范正修, 范瑞瑛, 邵建达. Study of Residual Stress in ZrO2 Thin Films[J]. Acta Optica Sinica, 2004, 24(4): 437.