[1] Ungula J, Dejene B F, Swart H C. Band gap engineering, enhanced morphology and photoluminescence of un-doped, Ga and/or Al-doped ZnO nanoparticles by reflux precipitation method[J]. Journal of Luminescence, 2018, 195: 54-60.

[2] 邵景珍, 王玺, 胡红涛, 等. 氧化锌薄膜的准分子激光退火热效应模拟分析[J]. 激光与光电子学进展, 2017, 54(6): 061401.

    Shao J Z, Wang X, Hu H T, et al. Thermal effect simulation analysis on excimer laser annealing of zinc oxide thin films[J]. Laser & Optoelectronics Progress, 2017, 54(6): 061401.

[3] Muchuweni E, Sathiaraj T S, Nyakotyo H. Hydrothermal synthesis of ZnO nanowires on RF sputtered Ga and Al co-doped ZnO thin films for solar cell application[J]. Journal of Alloys and Compounds, 2017, 721: 45-54.

[4] Yoshida Y, Tanaka S, Hiromitsu I, et al. Ga-doped ZnO film as a transparent electrode for phthalocyanine/perylene heterojunction solar cell[J]. Japanese Journal of Applied Physics, 2008, 47(2): 867-871.

[5] 苏雪琼, 王丽, 陈江博, 等. 不同衬底温度下PLD法制备的氧化锌薄膜的特性[J]. 光子学报, 2010, 39(2): 296-300.

    Su X Q, Wang L, Chen J B, et al. Properties of ZnO thin films with effect of substrate temperature by PLD[J]. Acta Photonica Sinica, 2010, 39(2): 296-300.

[6] Wang F H, Chen K N, Hsu C M, et al. Investigation of the structural, electrical, and optical properties of the nano-scale GZO thin films on glass and flexible polyimide substrates[J]. Nanomaterials, 2016, 6(5): 88.

[7] Chen Y Y, Juang J Y. Enhancement of Ga-doped zinc oxide film properties and deposition rate by multiple deposition using atmosphere pressure plasma jet[J]. Journal of Alloys and Compounds, 2017, 694: 452-458.

[8] Liau L C K, Huang J S. Effect of indium- and gallium-doped ZnO fabricated through sol-gel processing on energy level variations[J]. Materials Research Bulletin, 2018, 97: 6-12.

[9] Shewale P S, Lee S H, Yu Y S. Pulse repetition rate dependent structural, surface morphological and optoelectronic properties of Ga-doped ZnO thin films grown by pulsed laser deposition[J]. Journal of Alloys and Compounds, 2017, 725: 1106-1114.

[10] Ko Y D, Kim K C, Kim Y S. Effects of substrate temperature on the Ga-doped ZnO films as an anode material of organic light emitting diodes[J]. Superlattices and Microstructures, 2012, 51(6): 933-941.

[11] Mahdhi H, Alaya S, Gauffier J L, et al. Influence of thickness on the structural, optical and electrical properties of Ga-doped ZnO thin films deposited by sputtering magnetron[J]. Journal of Alloys and Compounds, 2017, 695: 697-703.

[12] Ebrahimifard R, Golobostanfard M R, Abdizadeh H. Sol-gel derived Al and Ga co-doped ZnO thin films: an optoelectronic study[J]. Applied Surface Science, 2014, 290: 252-259.

[13] Wang H L, Sun Y H, Fang L, et al. Growth and characterization of high transmittance GZO films prepared by sol-gel method[J]. Thin Solid Films, 2016, 615: 19-24.

[14] Muchuweni E, Sathiaraj T S, Nyakotyo H. Effect of gallium doping on the structural, optical and electrical properties of zinc oxide thin films prepared by spray pyrolysis[J]. Ceramics International, 2016, 42(8): 10066-10070.

[15] El-Desoky M M, Ali M A, Afifi G, et al. . Annealing effects on the structural and optical properties of growth ZnO thin films fabricated by pulsed laser deposition (PLD)[J]. Journal of Materials Science: Materials in Electronics, 2014, 25(11): 5071-5077.

[16] Han S, Shao Y K, Lu Y M, et al. Effect of different migration energy for reaction atoms on growth orientation and optical absorption characteristics of cubic MgZnO thin films under different pressure by PLD method[J]. Journal of Crystal Growth, 2014, 408: 125-128.

[17] Shinde S D, Deshmukh A V, Date S K, et al. Effect of Ga doping on micro/structural, electrical and optical properties of pulsed laser deposited ZnO thin films[J]. Thin Solid Films, 2011, 520(4): 1212-1217.

[18] Kim J H, Koo S M. Effect of epitaxial growth on electrical properties of Ga-doped ZnO thin films[J]. Ceramics International, 2015, 41(1): 37-42.

[19] Jen S U, Sun H, Chiang H P, et al. Optoelectronic properties and the electrical stability of Ga-doped ZnO thin films prepared via radio frequency sputtering[J]. Materials, 2016, 9(12): E987.

[20] Shewale P S, Lee S H, Yu Y S. UV sensitive pulsed laser deposited ZnO thin films: influence of growth temperature[J]. Journal of Alloys and Compounds, 2018, 744: 849-858.

[21] Zou Y S, Wang S L, Yang H, et al. Effect of substrate temperature on microstructure and optical properties of Ga doped ZnO films deposited by pulsed laser deposition[J]. Surface Engineering, 2015, 31(4): 302-307.

[22] Akin N, Kinaci B, Ozen Y, et al. Influence of RF power on the opto-electrical and structural properties of gallium-doped zinc oxide thin films[J]. Journal of Materials Science: Materials in Electronics, 2017, 28(10): 7376-7384.

[23] Garg V, Sengar B S, Awasthi V, et al. Investigation of dual-ion beam sputter-instigated plasmon generation in TCOs: a case study of GZO[J]. ACS Applied Materials & Interfaces, 2018, 10(6): 5464-5474.

[24] Hsu F H, Wang N F, Tsai Y Z, et al. A novel Al and Y codoped ZnO/n-Si heterojunction solar cells fabricated by pulsed laser deposition[J]. Solar Energy, 2012, 86(11): 3146-3152.

[25] Peng S, Yao T T, Yang Y, et al. Influences of the RF power ratio on the optical and electrical properties of GZO thin films by DC coupled RF magnetron sputtering at room temperature[J]. Physica B: Condensed Matter, 2016, 503: 111-116.

[26] Yan X, Li W M, Aberle A G, et al. Investigation of the thickness effect on material and surface texturing properties of sputtered ZnO∶Al films for thin-film Si solar cell applications[J]. Vacuum, 2015, 123: 151-159.

[27] Ajimsha R S, Das A K, Misra P, et al. Observation of low resistivity and high mobility in Ga doped ZnO thin films grown by buffer assisted pulsed laser deposition[J]. Journal of Alloys and Compounds, 2015, 638: 55-58.

[28] Shin H H, Joung Y H, Kang S J. Influence of the substrate temperature on the optical and electrical properties of Ga-doped ZnO thin films fabricated by pulsed laser deposition[J]. Journal of Materials Science: Materials in Electronics, 2009, 20(8): 704-708.

[29] Tsay C Y, Hsu W T. Comparative studies on ultraviolet-light-derived photoresponse properties of ZnO, AZO, and GZO transparent semiconductor thin films[J]. Materials, 2017, 10(12): 1379.

[30] Mahdhi H, Ben Ayadi Z, Hadded N, et al. Study of gallium doping and substrate temperature effects on structural, electrical and optical properties of ZnO semiconductor layers[J]. Journal of Materials Science: Materials in Electronics, 2015, 26(12): 9873-9881.

[31] 郭德双, 陈子男, 王登魁, 等. 退火温度对铝掺杂氧化锌薄膜晶体质量及光电性能的影响[J]. 中国激光, 2019, 46(4): 0403002.

    Guo D S, Chen Z N, Wang D K, et al. Effects of annealing temperature on crystal quality and photoelectric properties of Al-doped ZnO thin film[J]. Chinese Journal of Lasers, 2019, 46(4): 0403002.