太赫兹科学与电子信息学报, 2020, 18 (3): 538, 网络出版: 2020-07-16
基于 HNA溶液腐蚀的微半球谐振陀螺研究进展
Research progress of micro-scale hemispherical resonator gyroscopes based on etching of HNA solution
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郑显泽, 唐彬, 王月, 熊壮. 基于 HNA溶液腐蚀的微半球谐振陀螺研究进展[J]. 太赫兹科学与电子信息学报, 2020, 18(3): 538. ZHENG Xianze, TANG Bin, WANG Yue, XIONG Zhuang. Research progress of micro-scale hemispherical resonator gyroscopes based on etching of HNA solution[J]. Journal of terahertz science and electronic information technology, 2020, 18(3): 538.