一种基于偏振光干涉的原子力显微镜测头的研究
陈成, 高思田, 卢荣胜, 李伟. 一种基于偏振光干涉的原子力显微镜测头的研究[J]. 激光与光电子学进展, 2013, 50(4): 041203.
Chen Cheng, Gao Sitian, Lu Rongsheng, Li Wei. Gauging Head of Atomic Force Microscope Based on Interference of Polarized Light[J]. Laser & Optoelectronics Progress, 2013, 50(4): 041203.
[1] H. U. Danzebrink, L. Koenders, G. Wilkening et al.. Advances in scanning force microscopy for dimensional metrology［J］. CIRP Annals-Manufacturing Technology, 2006, 55(2): 841～878
[2] M. J. Cunningham, S. T. Cheng, W. W. Clegg. A differential interferometer for scanning force microscopy［J］. Meas. Sci. Technol., 1994, 5(11): 1350～1354
[3] 卢明臻, 高思田, 杜华 等. 计量型原子力测头模型研究及性能分析［J］. 纳米技术与精密工程, 2007, 5(1): 33～37
Lu Mingzhen, Gao Sitian, Du Hua et al.. Model of a metrological AFM head and performance analysis［J］. Nanotechnology and Precision Engineering, 2007, 5(1): 33～37
[4] 边文宾, 高思田, 卢荣胜 等. 共焦法布里-珀罗干涉显微镜测头光学特性分析［J］. 激光与光电子学进展, 2012, 49(5): 051203
[5] 冷炜, 杨甬英, 杨李茗 等. 一种新颖的点衍射干涉轻敲模式原子力显微镜［J］. 光学仪器, 2005, 27(3): 65～69
Leng Wei, Yang Yongying, Yang Liming et al.. A novel tapping mode atomic force microscopy using point-diffraction-interference technique［J］. Optical Instruments, 2005, 27(3): 65～69
[6] 殷纯永. 现代干涉测量技术［M］. 天津：天津大学出版社，1999. 297～300
Yin Chunyong. Modern Interferometric Measuring Technique［M］. Tianjin: Tianjin University Press,1999. 297～300
[7] A. J. Putman, G. De Grooth, Jan Greve et al.. A detailed analysis of the optical beam deflection technique for use in atomic force microscopy［J］. J. Appl. Phys., 1992, 72(1): 6～11
[8] 王伟, 吴福全, 苏富芳. 基于双Wollaston棱镜的对称分束角偏光分束镜［J］. 光学技术, 2004, 30(2): 182～186
Wang Wei, Wu Fuquan, Su Fufang. Symmetric polarization beam prism based on three-element Wollaston prism［J］. Optical Technique, 2004, 30(2): 182～186
[9] 朱化凤, 南玉杰, 云茂金 等. 双沃拉斯顿棱镜光强分束比精确分析［J］. 光学学报, 2012, 32(6): 0623002
[10] 邓红艳, 吴福全, 邓萌萌 等. 双Wollaston棱镜光强分束比研究［J］. 光子学报, 2007, 36(7): 1331～1334
[11] 郁道银, 谈恒英. 工程光学［M］. 北京：机械工业出版社，2006. 440～454
Yu Daoyin, Tan Hengying. Engineering Optics［M］. Beijing: China Machine Press, 2006. 440～454
[12] 杨晓冬, 邵建新, 廖生鸿 等. 刀口法测量高斯光束光斑半径研究［J］. 激光与红外, 2009, 39(8): 829～832
Yang Xiaodong, Shao Jianxin, Liao Shenghong et al.. Investigation on measuring beam width of the Gaussian beam by knife-edge method［J］. Laser & Infrared, 2009, 39(8): 829～832
陈成, 高思田, 卢荣胜, 李伟. 一种基于偏振光干涉的原子力显微镜测头的研究[J]. 激光与光电子学进展, 2013, 50(4): 041203. Chen Cheng, Gao Sitian, Lu Rongsheng, Li Wei. Gauging Head of Atomic Force Microscope Based on Interference of Polarized Light[J]. Laser & Optoelectronics Progress, 2013, 50(4): 041203.
PDF全文
