激光与光电子学进展, 2013, 50 (4): 041203, 网络出版: 2013-03-22  

一种基于偏振光干涉的原子力显微镜测头的研究

Gauging Head of Atomic Force Microscope Based on Interference of Polarized Light
作者单位
1 合肥工业大学仪器科学与光电工程学院, 安徽 合肥 230009
2 中国计量科学研究院纳米新材料计量研究所, 北京 100013
摘要
为了提高测头的抗干扰能力,达到较高的分辨率,设计了一种基于偏振光干涉原理的原子力显微镜测头。该测头采用偏振光干涉式方法探测针尖的位移,可提高测头的灵敏度。分析了测头设计中焦点聚焦在探针悬臂梁上的可行性,并通过实验进行了验证。实验表明,Wollaston棱镜组可以有效地改变光程差。设计的共光路形式的Nomarski干涉仪光路,能够有效减小噪音的影响,并保证装置结构紧凑,适于实用。通过实验验证,此测头系统能够达到1 nm的纵向分辨精度,为原子力显微镜测量技术提供有力支持。
Abstract
A auging head of atomic force microscopy (AFM) based on interference of polarized light is designed for high resolution and capacity of resisting disturbance. This AFM head detects the tip displacement based on interference, in order to increase the sensitivity. In the process of design, the feasibility of focal spot on the cantilever is analyzed, and verified with experiment. The experimental result shows that two Wollastton prisms can effectively change the optical-path difference between reference beam and measurement beam, and reduce the size of AFM head. The design of common-path Nomarski interferometer can reduce noise, keep the structure of head compact and make this system useful. The axial resolution of the system can reach up to 1 nm. It can support the research of AFM technology.
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陈成, 高思田, 卢荣胜, 李伟. 一种基于偏振光干涉的原子力显微镜测头的研究[J]. 激光与光电子学进展, 2013, 50(4): 041203. Chen Cheng, Gao Sitian, Lu Rongsheng, Li Wei. Gauging Head of Atomic Force Microscope Based on Interference of Polarized Light[J]. Laser & Optoelectronics Progress, 2013, 50(4): 041203.

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