柔性MEMS减阻蒙皮设计及其制作工艺
[1] 董文才,郭日修.气幕减阻研究进展[J].船舶力学,1998,2(5): 73-78.
DONG W C, GUO R X. Research progress of air injection drag reduction [J]. Academy of Naval Engineering, 1998,2(5):73-78. (in Chinese)
[2] DUNISCHEV Y N, EVSEEV A R, SOBOLEV V S, et al.. Study of gas-saturated turbulent streams using a laser Doppler velocity meter [J]. Journal of Applied Mechanics and Technical Physics, 1975, 16(1):114-119.
[3] MADAVAN N K, DEUTSCH S, MERKLE C L. Reduction of turbulent skin friction by micro bubbles [J]. The Physics of Fluids,1984, 27(2):356-363.
[4] 董文才,郭日修,陈小玲,等.滑行艇气层减阻试验[J].中国造船,2002,43(4):13-18.
DONG W C, GUO R X, CHEN X L, et al.. Experimental study on resistance reduction of planning craft by air injection [J]. Ship Building of China, 2002, 43(4):13-18. (in Chinese)
[5] 陈旭鹏, 李勇, 朱效谷, 等.柔性MEMS减阻蒙皮及其制造方法:中国, ZL200910079713.0 [P].2009-7-22.
CHEN X P,LI Y,ZHU X G,et al.. Flexible MEMS anti-dray skin and its fabrication:China,ZL2200910079713.0 [P].2009-7-22.
[6] STEPHANI K A, GOLDSTEIN D B. An examination of trapped bubbles for viscous drag reduction on submerged surfaces [J]. Journal of Fluids Engineering, Transactions of the ASME, 2010, 132(4): 041303-1-9.
[7] BARTH P W, BERNARD S L, ANGELL J B. Flexible circuit and sensor arrays fabricated by monolithic silicon technology [J]. IEEE Trans. Electron Devices, 1985, 32(7):1202-1205.
[8] JIANG F K, LEE G B, TAI Y C, et al.. A flexible micro machine-based shear-stress sensor array and its application to separation-point detection [J]. Sensors and Actuators: A-Physical, 2003, 79(3):194-203.
[9] 芮岳峰,王亚军,刘景全,等.基于Parylene的柔性生物微电极阵列的制作[J].纳米技术与精密工程,2011,9(5): 422-426.
RUI Y F, WANG Y J, LIU J Q, et al.. Fabrication of parylene-based flexible microelectrode arrays [J]. Nanotechnology and Precision Engineering, 2011,9(5):422-426. (in Chinese)
[10] KIM E, XIA Y N, WHITESHIDES G M. Polymer microstructures formed by moulding in capillaries [J]. Nature, 1995, 118: 5722-5731.
[11] KIM E, XIA Y N, WHITESHIDES G M. Micromolding in capillaries: applications in materials science [J]. Journal of the American Chemical Society, 1996, 118 (24): 5722-5731.
[12] XIA Y N, KIM E, WHITESIDES G M. Micromolding of polymers in capillaries: applications in microfabrication [J]. Chemistry of Materials, 1996, 8(7): 1558-1567.
[13] BALAKRISNAN B, PATIL S, SMELA E. Patterning PDMS using a combination of wet and dry etching [J]. Journal of Micromechanics and Microengineering,2009, 19:047002-1-7.
[14] GARRA J, LONG T, CURRIE J, et al.. Dry etching of polydimethylsiloxane for microfluidic systems [J]. American Vacuum Society, 2002, 20(3): 975-982.
[15] BOGDANOV A L, PEREDKOV S S. Use of SU-8 photoresist for very high aspect ratio x-ray lithography [J]. Journal of Micromechanics and Microengineering, 2007,17(6):81-95.
[16] LORENZ H, DESPONT M, FAHRNI N, et al.. High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS [J]. Sensors and Actuators,1998,64(1):33-39.
[17] 黄新龙,熊瑛,陈光焱,等.UV-LIGA技术制作微型螺旋形加速开关[J].光学 精密工程,2010, 18(5):1152-1158.
[18] 褚金奎,陈兆鹏,张然.集成铜金属压阻层的SU-8胶悬臂梁微力传感器的制作[J]. 光学 精密工程, 2011, 19(12): 2935-2940.
李勇, 李文平, 朱效谷. 柔性MEMS减阻蒙皮设计及其制作工艺[J]. 光学 精密工程, 2012, 20(12): 2696. LI Yong, LI Wen-ping, ZHU Xiao-gu. Design and fabrication of flexible MEMS anti-drag skin[J]. Optics and Precision Engineering, 2012, 20(12): 2696.