一种新型微机电系统法布里珀罗滤波器的设计与分析

基于微机电系统(MEMS)技术，提出了一种光栅与法布里珀罗(F-P)腔相结合的新型MEMS F-P滤波器结构，这种滤波器既能保证较宽的自由光谱范围又能够获得较窄的半峰全宽。从实现机理、参数设计和选择对F-P滤波器的结构进行了深入分析，并着重对微桥桥面的机电性能进行了仿真计算。通过选择不同的微桥桥面厚度（0.5，0.6，0.7，0.8，0.9，1 μm），比较微桥在静电力作用下的平整度，发现当微桥表面厚度为1 μm时，得到了一个较优结果，在5 V电压下，上反射镜的倾斜位移ΔL为9.11 nm，最大腔长变化量为242 nm，这样能保持前后腔面反射光的平行要求，从而保证滤波器的滤波效率和对选择光的利用率。该滤波器能够解决传统微型滤波器自由光谱范围与半峰全宽相互限制的矛盾，提高微型滤波器的性能。

Abstract

Based on micro-electromechanical systems (MEMS) technology, a new MEMS Fabry-Perot filter structure combining with grating and Fabry-Perot cavity is proposed. This filter can not only ensure a wide free spectral range, but a narrow full width at half maximum (FWHM). The implementation mechanism, the parameters selection and the structure of the Fabry-Perot filter are analyzed deeply, and a simulation to calculate the mechanical and electrical properties of the micro-bridge deck is made. By choosing different thicknesses of the micro-bridge deck (0.5, 0.6, 0.7, 0.8, 0.9, 1 μm), and comparing with the flatness of micro-bridge within electrostatic interactions, it is found that when thickness is 1 μm and voltage is 5 V, the tilt displacement of the upper-mirror is 9.11 nm and the maximum cavity length change is 242 nm, which can maintain top and bottom cavity surface reflecting light parallel, and ensure filter′s filtering efficiency and selected light utilization. This novel filter is able to solve the contradiction that the free spectral range and the FWHM restrict from each other in traditional micro-filters. Thereby, the performance of the micro-filter has improved.

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