热处理对离子束溅射Ta2O5薄膜特性的影响
刘华松, 姜承慧, 王利栓, 刘丹丹, 季一勤, 陈德应. 热处理对离子束溅射Ta2O5薄膜特性的影响[J]. 光学 精密工程, 2014, 22(10): 2645.
LIU Hua-song, JIANG Cheng-hui, WANG Li-shuan, LIU Dan-dan, JI Yi-qin, CHEN De-ying. Effects of annealing on properties of Ta2O5 thin films deposited by ion beam sputtering[J]. Optics and Precision Engineering, 2014, 22(10): 2645.
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刘华松, 姜承慧, 王利栓, 刘丹丹, 季一勤, 陈德应. 热处理对离子束溅射Ta2O5薄膜特性的影响[J]. 光学 精密工程, 2014, 22(10): 2645. LIU Hua-song, JIANG Cheng-hui, WANG Li-shuan, LIU Dan-dan, JI Yi-qin, CHEN De-ying. Effects of annealing on properties of Ta2O5 thin films deposited by ion beam sputtering[J]. Optics and Precision Engineering, 2014, 22(10): 2645.