步进扫描投影光刻机工件台和掩模台的进展 
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刘丹, 程兆谷, 高海军, 黄惠杰, 赵全忠, 谌巍. 步进扫描投影光刻机工件台和掩模台的进展[J]. 激光与光电子学进展, 2003, 40(5): 14. 刘丹, 程兆谷, 高海军, 黄惠杰, 赵全忠, 谌巍. Proress of Wafer Stage and Reticle Stage for Step-and-Scan-Lithography System[J]. Laser & Optoelectronics Progress, 2003, 40(5): 14.
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