激光与光电子学进展, 2018, 55 (6): 061203, 网络出版: 2018-09-11
多点实时光刻机光源照度均匀度检测系统设计 下载: 1153次
Design of Multi-Point Real-Time Lithography Light Source Uniformity Detection System
补充材料
赵可为, 谭艾英, 尹韶云, 蔡文涛, 杨若夫, 陈建军, 佟首峰. 多点实时光刻机光源照度均匀度检测系统设计[J]. 激光与光电子学进展, 2018, 55(6): 061203. Kewei Zhao, Aiying Tan, Shaoyun Yin, Wentao Cai, Ruofu Yang, Jianjun Chen, Shoufeng Tong. Design of Multi-Point Real-Time Lithography Light Source Uniformity Detection System[J]. Laser & Optoelectronics Progress, 2018, 55(6): 061203.