碳氮膜的一种新的拉曼光谱结构

报道了一种碳氮薄膜材料的拉曼光谱,该光谱明显具有两个特征拉曼峰,和已有的碳基薄膜及碳氢薄膜相区别,其峰值位置分别位于1400cm~(-1)及1370cm~(-1)。根据X射线衍射(XRD)分析和扫描电子显微镜(SEM)对该薄膜的形貌观察,初步认定该薄膜是由纳米级含氮弯曲层状石墨结构组成。拉曼峰1400cm~(-1)对应与弯曲面内C-C振动,拉曼峰1370cm cm~(-1)对应于长程无序而形成的D-线。该碳氮薄膜样品是采用微波等离子体化学气相沉积方法(MPCVD)制备而成。

Abstract

A Raman spectrum of carbon nitride thin film is reported in this paper. There are two Raman peaks of 1400 cm-1 and 1370 cm-1 existed in the Raman spectrum, which is different structure comparing with Raman spectra of all known carbon based materials and carbon nitride. According to X-ray diffraction analysis (XRD) and surface morphology of the film taken by scanning electron microscopy (SEM), the nitrogen containing carbon thin film could be considered to have nano-scale graphite structure with buckling of the basal planes. The Raman peak of 1400 cm1 corresponds to C-C vibration in the basal planes. The other peak of 1370 cm 1 is attributed to disordered structure in long range. The sample of carbon nitride thin film was prepared by using macro wave plasma chemical vapor deposition (MPCVD) system.

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张兰, 马会中, 李会军, 杨仕娥, 姚宁, 胡欢陵, 张兵临. 碳氮膜的一种新的拉曼光谱结构[J]. 中国激光, 2003, 30(s1): 105. ZHANG Lan, MA Hui-zhong, LI Hui-jun, YANG Shi-e, YAO Ning, HU Huan-ling, ZHANG Bing-lin. A New Structure of Raman Spectrum from Nitrogen Containing Carbon Thin Film[J]. Chinese Journal of Lasers, 2003, 30(s1): 105.

碳氮膜的一种新的拉曼光谱结构

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