光学元件缺陷在线检测光学系统设计

为实现对望远镜系统中光学元件表面缺陷在线检测, 介绍了一种用于光学元件表面缺陷检测的变焦距成像光学系统, 采用机械变焦形式实现变焦功能。根据望远镜系统技术要求计算出变焦距系统的关键参数, 通过Zemax软件设计并优化得到最终结果, 整个变焦系统的设计实现了90 mm~540 mm的6倍变焦, 在变焦过程中F数和像面位置保持不变, 变焦系统总长为553.1 mm。从调制传递函数(MTF)、点列图2个方面分析了系统的成像质量, 系统在各焦距处的MTF值在100 lp/mm处均大于0.3, 物方分辨率优于0.055 mm, 在不同焦距处弥散斑半径均方根值均控制在艾里斑半径范围内。最后对系统环境适应性进行了分析, 讨论了工作温度范围为-10℃~40℃时对系统成像质量的影响, 并给出了温度补偿方案。实验结果表明, 补偿后的系统成像质量良好, 满足实际需求。

Abstract

In order to realize the on-line detection of the surface defects of optical elements in the telescope system, a zoom imaging optical system for the detection of the surface defects of optical elements was introduced. Firstly, some key parameters of the zoom system were calculated according to the technical requirements of the telescope system. Then, the final result was obtained after design and optimization with Zemax software. Thewhole zoom system achieves a 6-fold continuous zoom with a focal length of 90 mm~540 mm. During the zoom process, the F number and image surface position of the system remain unchanged, and the design results show that the total length of the zoom system is 553.1mm.Finally, we analyzed the imaging quality of the system from modulation transfer function (MTF) and point sequence diagram.The MTF value of the system at each focal length is greater than 0.3 in 100 lp/mm, and the object resolution is better than 0.055 mm. The root mean square value of the diffusion spot radius of the system at different focal lengths is controlled within the airy spot radius. In addition, we also analyzed the environmental adaptability of the system, studiedthe imaging quality of the system in the temperature range of -10℃~40℃, and gave the temperature compensation scheme. The imaging quality of the whole system is good and can meet the actual demandafter compensation.

参考文献

[1] 杨甬英, 陆春华, 梁蛟, 等. 光学元件表面缺陷的显微散射暗场成像及数字化评价系统［J］. 光学学报, 2007, 27(6) : 1032-1038.

YANG Yongying, LU Chunhua, LIANG Jiao, et al. Microscopic dark-field scattering imaging and digitalization evaluation system of defects on optical devices precision surface ［J］.Acta Optica Sinica , 2007, 27(6): 1032-1038.

[2] 赵文川, 钟显云, 刘彬, 等. 基于条纹反射的光学表面疵病检测法［J］. 光子学报, 2014, 43(9): 161-165.

ZHAO Wenchuan, ZHONG Xianyun, LIU Bin, et al. The surface flaws inspection of optical components based on the fringe reflection［J］. Acta Photonica Sinica, 2014, 43(9): 161-165.

[3] 刘巧玲, 陈丽娜, 余华恩, 等.可变焦距机器视觉镜头光学系统设计［J］. 应用光学, 2015, 36(2): 199-205.

LIU Qiaoling, CHEN Lina, YU huaen, et al. Optical system design of zoom lens for machine vision systems［J］. Journal of Applied Optics, 2015, 36(2): 199-205.

[4] CONDER A, AZEVEDO S, KEGELMEYER L, et al. Final optics damageinspection (FODI) for the national ignition facility［C］.USA: SPIE, 2015: 953212-1.

[5] 彭志涛. 强激光复杂光机组件光学元件激光损伤在线检测技术研究［D］. 四川: 中国工程物理研究院, 2011: 41-48.

PENG Zhitao. Research on on-line laser damage detection technology for optical components of complex laser units［D］. Sichuan: Chinese Academy of Engineering Physics, 2011: 41-48.

[6] 任冰强, 黄惠杰, 张维新, 等.光学元件损伤在线检测装置及实验研究［J］. 强激光与离子束, 2004, 16(4): 466-468.

REN Bingqiang, HUANG Huijie, ZHANG Weixin, et al. Online inspection apparatus and experiments on optics damage［J］. High Power Laser and Particle Beams , 2004, 16(4), 466-468.

[7] 程晓峰, 徐旭, 张林, 等. 基于高分辨率CCD的大口径光学元件疵病检测［J］. 强激光与离子束, 2009, 21(11): 1677-1680.

CHENG Xiaofeng, XU Xu, ZHANG Lin, et al. Defect testing of large aperture optics based on high resolution CCD camera［J］. High Power Laser and Particle Beams, 2009, 21 (11), 1677-1680.

[8] 胡际先. 长焦距大口径连续变焦光学系统设计［J］. 应用光学, 2007, 28(5): 569-577.

HU Jixian. Design of large aperture and long focal length zoom optical system［J］. Journal of Applied Optics, 2007, 28(5): 569-577.

[9] 冯博, 刘炳国, 陈凤东. ICF终端光学元件损伤在线检测装置的研究［J］. 红外与激光工程, 2013, 42(9): 2520-2524.

FENG Bo, LIU Bingguo, CHEN Fengdong, et al.Final optics damage online inspection system for ICF ［J］. Infrared and Laser Engineering, 2013, 42(9), 2520-2524.

[10] 王新学, 焦明印. 红外光学系统无热化设计方法的研究［J］.应用光学, 2009, 30(1): 129-134.

WANG Xinxue, JIAO Mingyin. Athermalization design forinfrared optical system ［J］. Journal of Applied Optics, 2009, 30(1): 129-134

[11] 刘峰, 徐熙平, 孙向阳.高变倍比红外变焦距光学系统设计［J］.应用光学, 2009, 30(6): 1020-1023.

LIU Feng, XU Xiping, SUN Xiangyang. Design of high zoom ratio thermal infrared zoom optical system［J］. Journal of Applied Optics, 2009, 30(6): 1020-1023.

[12] 李晓彤, 芩兆丰.几何光学·像差·光学设计［M］. 浙江: 浙江大学出版社, 2007: 240-245.

LI Xiaotong, QIN Zhaofeng. Geometrical optics·Aberrations·Optical design［M］. Zhejiang: Zhejiang University Press, 2007: 240-245.

[13] 曾振煌, 林峰. 30 mm～110 mm大孔径红外变焦热像镜头设计［J］. 应用光学, 2016, 37(5): 752-757.

ZENG Zhenhuang, LIN Feng. Design of 30 nm~110 mm zoom infrared thermal imaging system with large aperture［J］. Journal of Applied Optics, 2016, 37(5): 752-757.

[14] 江伦, 黄玮. 高变倍比变焦距系统设计［J］.光学学报, 2011, 12(12): 1222006.

JIANG Lun, HUANG Wei. Lens design for optical system of high zoom ratio ［J］. Acta Optica Sinica, 2011, 12(12): 1222006.

[15] 李宏壮, 张振铎. 20倍双组联动变焦距光学系统设计［J］.光学学报, 2015, 35(2): 0222003.

LI Hongzhuang, ZHANG Zhenduo. Design of 20×double-linkage continuous zoom optical system ［J］. Acta Optica Sinica, 2015, 35(2): 0222003.

张文学, 王继红, 任戈. 光学元件缺陷在线检测光学系统设计[J]. 应用光学, 2019, 40(5): 779. ZHANG Wenxue, WANG Jihong, REN Ge. Optical system design for on-line defects detection of optical components[J]. Journal of Applied Optics, 2019, 40(5): 779.

光学元件缺陷在线检测光学系统设计

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