基于激光追踪仪多站位测量的CMM空域坐标修正方法

三坐标测量机（CMM）是坐标测量技术中高效率的精密测量系统，随着超精密加工技术的发展，对三坐标测量机测量精度的要求越来越高。考虑到三坐标测量机在测量过程中的弱刚体性状态，提出了一种基于激光追踪仪多站位测量的三坐标测量机空域坐标修正方法。首先建立激光追踪仪多站位测量系统，然后利用激光追踪仪的高精度干涉测长值对被测空域内的三坐标测量机待测点坐标进行修正，最后利用三线性插值方法对三坐标测量机的被测空域坐标进行修正。仿真实验结果表明利用所提出的空域坐标修正方法得到的标准球直径标准差均值为0.098 μm，小于三坐标测量机直接测量得到的标准差均值0.118 μm，验证了所提出的方法可以有效提高三坐标测量机空域坐标精度。

Abstract

Coordinate measuring machine (CMM) is a high efficiency precision measurement system for coordinate measurement technology. As the development of ultra-precision machining technology, the requirement of the measuring precision of CMM is getting higher and higher. Considering the weak rigid body state of CMM in the process of measurement, this paper proposes a CMM spatial coordinate correction method based on multistation measurement of laser tracer. Firstly, the laser tracer multistation measurement system is set up. Then, the coordinate of measuring point of CMM is corrected by using the high precision interference length of the laser tracer. Finally, the measuring spatial coordinate of CMM is corrected by using the trilinear interpolation method. The simulation experimental results show that the average of the standard deviation of the standard sphere diameter obtained by proposed spatial coordinate correction method is 0.098 μm, which is smaller than 0.118 μm, the average of the standard deviation directly measured by CMM. The results verify that the proposed method can effectively improve the spatial coordinate accuracy of CMM.

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陈洪芳, 郑博文, 石照耀, 孙衍强, 隆昌宇, 杨再华. 基于激光追踪仪多站位测量的CMM空域坐标修正方法[J]. 中国激光, 2017, 44(3): 0304003. Chen Hongfang, Zheng Bowen, Shi Zhaoyao, Sun Yanqiang, Long Changyu, Yang Zaihua. CMM Spatial Coordinate Correction Method Based on Laser Tracer Multistation Measurement[J]. Chinese Journal of Lasers, 2017, 44(3): 0304003.

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