[1] Suratwala T, Wong L, Miller P, et al. Sub-surface mechanical damage distributions during grinding of fused silica[J]. Journal of Non-Crystalline Solids, 2006, 352(52/53/54): 5601-5617.

[2] Stevens-Kalceff M A, Wong J. Distribution of defects induced in fused silica by ultraviolet laser pulses before and after treatment with a CO2 laser[J]. Journal of Applied Physics, 2005, 97(11): 113519.

[3] 王英剑, 胡海洋, 李庆国, 等. 高反射硅镜弱吸收的研究[J]. 中国激光, 2001, 28(10): 937-940.

    Wang Y J, Hu H Y, Li Q G, et al. Study of weak absorption of the thin films coated on the S plates[J]. Chinese Journal of Lasers, 2001, 28(10): 937-940.

[4] 崔辉, 刘世杰, 赵元安, 等. 全内反射显微技术探测亚表面缺陷新方法研究[J]. 光学学报, 2014, 34(6): 0612004.

    Cui H, Liu S J, Zhao Y A, et al. Study on total internal reflection microscopy for subsurface damage[J]. Acta Optica Sinica, 2014, 34(6): 0612004.

[5] 项震, 聂传继, 葛剑虹, 等. 光学元件亚表面缺陷结构的蚀刻消除[J]. 强激光与粒子束, 2007, 19(3): 373-376.

    Xiang Z, Nie C J, Ge J H, et al. Eliminating of subsurface damage structure[J]. High Power Laser and Particle Beams, 2007, 19(3): 373-376.

[6] Norton M A, Hrubesh L W, Wu Z L, et al. Growth of laser-initiated damage in fused silica at 351 nm[J]. Proceedings of SPIE, 2001, 4347: 468-469.

[7] 徐世珍, 吕海兵, 田东斌, 等. 酸蚀深度对熔石英三倍频激光损伤阈值的影响[J]. 强激光与粒子束, 2008, 20(5): 760-764.

    Xu S Z, Lü H B, Tian D B, et al. Effects of acid-etching depth on 355 nm laser-induced damage threshold of fused silica[J]. High Power Laser and Particle Beams, 2008, 20(5): 760-764.

[8] Suratwala T, Steele R, Feit M D, et al. Effect of rogue particles on the sub-surface damage of fused silica during grinding/polishing[J]. Journal of Non-Crystalline Solids, 2008, 354(18): 2023-2037.

[9] Hobbs D S. MacLeod B D, Riccobono J R. Update on the development of high performance anti-reflecting surface relief micro-structures[J]. Proceedings of SPIE, 2007, 6545: 65450Y.

[10] Li Y F, Zhang J H, Yang B. Antireflective surfaces based on biomimetic nanopillared arrays[J]. Nano Today, 2010, 5(2): 117-127.

[11] Wang X D, Liao Y L, Liu B, et al. Free-standing SU-8 subwavelength gratings fabricated by UV curing imprint[J]. Microelectronic Engineering, 2008, 85(5/6): 910-913.

[12] Ma W H, Zhang M S, Shun L, et al. Raman-spectroscopy study of PbTiO3 thin films grown on Si substrates by metalorganic chemical vapor deposition[J]. Applied Physics A: Materials Science & Processing, 1996, 62(3): 281-284.

[13] Jiang P. McFarland M J. Wafer-scale periodic nanohole arrays templated from two-dimensional nonclose-packed colloidal crystals[J]. Journal of the American Chemical Society, 2005, 127(11): 3710-3711.

[14] Sun C H, Gonzalez A, Linn N C, et al. Templated biomimetic multifunctional coatings[J]. Applied Physics Letters, 2008, 92(5): 051107.

[15] Kamimura T, Akamatsu S, Horibe H, et al. Enhancement of surface-damage resistance by removing subsurface damage in fused silica and its dependence on wavelength[J]. Japanese Journal of Applied Physics, 2004, 43(9A/B): L1229-L1231.

[16] Seeger K, Palmer R E. Fabrication of silicon cones and pillars using rough metal films as plasma etching masks[J]. Applied Physics Letters, 1999, 74(11): 1627-1629.

[17] Schulze M, Fuchs H J, Kley E B, et al. New approach for antireflective fused silica surfaces by statistical nanostructures[J]. Proceedings of SPIE, 2008, 6883: 68830N.

[18] 邹广健, 张宝富, 李诚鑫, 等. 光电震荡器的混沌光子压缩采样方法[J]. 中国激光, 2017, 44(11): 1106002.

    Zou G J, Zhang B F, Li C X, et al. Chaotic photonic compressed sampling based on optoelectronic oscillator[J]. Chinese Journal of Lasers, 2017, 44(11): 1106002.

[19] Ye X, Jiang X D, Huang J, et al. Formation of broadband antireflective and superhydrophilic subwavelength structures on fused silica using one-step self-masking reactive ion etching[J]. Scientific Reports, 2015, 5(1): 013023.

[20] 丁俊伟, 梁斌明, 蒋强, 等. 近零折射率材料相位特性及应用[J]. 激光与光电子学进展, 2017, 54(3): 031603.

    Ding J W, Liang B M, Jiang Q, et al. Phase characteristic of near zero refractive index material and its application[J]. Laser & Optoelectronics Progress, 2017, 54(3): 031603.

[21] Trost M, Herffurth T, Schmitz D, et al. Evaluation of subsurface damage by light scattering techniques[J]. Applied Optics, 2013, 52(26): 6579-6588.

[22] Neauport J, Ambard C, Cormont P, et al. Subsurface damage measurement of ground fused silica parts by HF etching techniques[J]. Optics Express, 2009, 17(22): 20448-20456.

[23] Williams W B, Mullany B A, Parker W C, et al. Using quantum dots to tag subsurface damage in lapped and polished glass samples[J]. Applied Optics, 2009, 48(27): 5155-5163.