PECVD技术在微结构表面沉积薄膜的复形性 下载: 574次
潘永强, 陈佳. PECVD技术在微结构表面沉积薄膜的复形性[J]. 激光与光电子学进展, 2017, 54(11): 113102.
Pan Yongqiang, Chen Jia. Reproducibility of Thin Films Deposited on Microstructure Surface by PECVD Technology[J]. Laser & Optoelectronics Progress, 2017, 54(11): 113102.
[1] 王金成, 匡翠方, 王轶凡, 等. 基于压缩感知的荧光显微多光谱成像[J]. 中国激光, 2013, 40(12): 1204003.
[2] 王少伟, 陈效双, 陆卫. 集成微腔分光器件及在微型光谱仪中的应用[C]. 上海市红外与遥感学会第十九届学术年会, 2014: 59-65.
Wang Shaowei, Chen Xiaoshuang, Lu Wei. Integrated-cavities wavelength division devices and their application for micro-spectrometers[C]. The Nineteenth Annual Academic Conference of Shanghai Infrared and Remote Sensing Society, 2014: 59-65.
[3] 张建寰, 刘婷婷, 林珊. 微型化多通道滤光片光谱串扰模型的建立和评价[J]. 光学技术, 2013, 39(6): 540-543.
[4] 刘光明. 表面处理技术概论[M]. 北京: 化学工业出版社, 2011.
Liu Guangming. Introduction to surface treatment technology[M]. Beijing: Chemical Industry Press, 2011.
[5] 陈晟, 马艳, 张萍萍, 等. 原子纳米光刻中双层光学掩膜的实现方法研究[J]. 红外与激光工程, 2014, 43(7): 2070-2073.
Chen Sheng, Ma Yan, Zhang Pingping, et al. Production of double-layer light mask in atom nano-lithography[J]. Infrared and Laser Engineering, 2014, 43(7): 2070-2073.
[6] 王少伟, 陈效双, 陆卫. 基于光刻工艺的阶跃滤光片式微型分光器件研制[J]. 光学学报, 2009, 29(5): 1358-1362.
[7] Gluck N S, Gunning W J. Patterned infrared spectral filter directly deposited onto cooled substrates[J]. Applied Optics, 1989, 28(23): 5110-5114.
[8] 王云姬. 集成滤光微结构的InGaAs短波红外探测器[D]. 上海: 上海技术物理研究所, 2014.
Wang Yunji. Integrated filter for InGaAs short wave infrared detector[D]. Shanghai: Shanghai Institute of Technical Physics of the Chinese Academy of Sciences, 2014.
[9] Yi D R, Kong L H. Fabrication of densely patterned micro-arrayed multichannel optical filter-mosaic[J]. Journal of Micro-Nanolithography MEMS and MOEMS, 2011, 10(3): 033020.
[10] 程实平, 严义埙, 张凤山, 等. 3通道短波红外光谱可识别列阵探测器的研制[J]. 红外与毫米波学报, 1994, 13(6): 401-404.
Cheng Shiping, Yan Yixun, Zhang Fengshan, et al. Development of three-channel short-wave IR spectrum distinguishable detector array[J]. Journal of Infrared and Millimeter Waves, 1994, 13(6): 401-404.
[11] Wang S W, Liu D, Lin B, et al. 16×1 integrated filter array in the MIR region prepared by using a combinatorial etching technique[J]. Applied Physics B, 2006, 82(4): 637-641.
[12] 罗海瀚, 李耀鹏, 蔡清元, 等. 组合套镀法制备2.0~2.4 μm波段8通道微型集成滤光片[J]. 中国激光, 2012, 39(11): 1107001.
[13] 张建寰, 张陈涛, 卓勇, 等. 多光谱阴道镜的微型化多通道滤光片设计[J]. 光学 精密工程, 2012, 20(9): 2035-2040.
[14] 陶涛, 苏辉, 谢自力, 等. PECVD法氮化硅薄膜生长工艺的研究[J]. 纳米材料与结构, 2010, 47(5): 267-272.
Tao Tao, Su Hui, Xie Zili, et al. Research on nitride membranes grown by PECVD[J]. Nanomaterial and Structure, 2010, 47(5): 267-272.
[15] 潘永强, 陈佳. 微结构窄带滤光片设计及制备工艺研究[J]. 应用光学, 2017, 38(1): 78-82.
[16] 张霄. PECVD技术制作减反膜研究[D]. 西安: 西安工业大学, 2010.
Zhang Xiao. Research on anti-reflection coatings by PECVD technology[D]. Xi′an: Xi′an Technological University, 2010.
潘永强, 陈佳. PECVD技术在微结构表面沉积薄膜的复形性[J]. 激光与光电子学进展, 2017, 54(11): 113102. Pan Yongqiang, Chen Jia. Reproducibility of Thin Films Deposited on Microstructure Surface by PECVD Technology[J]. Laser & Optoelectronics Progress, 2017, 54(11): 113102.