激光与光电子学进展, 2017, 54 (11): 113102, 网络出版: 2017-11-17
PECVD技术在微结构表面沉积薄膜的复形性 下载: 574次
Reproducibility of Thin Films Deposited on Microstructure Surface by PECVD Technology
图 & 表
潘永强, 陈佳. PECVD技术在微结构表面沉积薄膜的复形性[J]. 激光与光电子学进展, 2017, 54(11): 113102. Pan Yongqiang, Chen Jia. Reproducibility of Thin Films Deposited on Microstructure Surface by PECVD Technology[J]. Laser & Optoelectronics Progress, 2017, 54(11): 113102.